Abstract:The development of non-invasive process diagnostic techniques for the control of atmospheric plasmas is a critical issue for the wider adoption of this technology. This paper evaluates the use of a frequency-domain deconvolution of an electro-acoustic emission as a means to monitor and control the plasma formed using an atmospheric pressure plasma jet (APPJ) system. The air plasma system investigated was formed using a PlasmaTreat™ OpenAir applicator. Change in the electro-acoustic signal with changes in substrate type (ceramic, steel, polymer). APPJ nozzle to substrate distance and substrate feature size were monitored. The decoding of the electro-acoustic emission yields three sub dataset that are described three separate emission mechanisms. The three emissions are associated with: the power supply fundamental drive frequency and its harmonics; the APPJ nozzle longitudinal mode acoustic emission and its odd overtones, and the acoustic surface reflection that is produced by the impedance mismatch between the discharge and the surface.Incorporating this knowledge into a LabVIEW a program facilitated the continuous deconvolution of the electro-acoustic data. This enabled the use of specific frequency band test limits to control the process the APPJ treatment process which is sensitive to both plasma processing conditions and substrate type and features.PAC Codes: 52.40. Hf, 52.77.Fv, 43.60.Vx Keywords: atmospheric plasma, electrical harmonics, acoustic overtones, surface location, fault detection.Draft for submission to PSST 2
IntroductionWith the increased use of atmospheric plasma systems in applications ranging from polymer surface activation to coating deposition [1,2] there is a growing need for the development of non-invasive insitu process monitoring techniques. This paper evaluates the use of electro-acoustic technique as a means of achieving this process monitoring of an atmospheric plasma jet system. Since the late 1990s the acoustic emission from laboratory scale atmospheric pressure plasma jet (APPJ) systems [3,4], and optical-acoustic studies of plasma welding process [5] have been reported. Following these reports acoustic metrology has been used in the monitoring of anomalous arc discharge in plasma processing equipment plasma [6], plasma and laser welding [7, 8 and 9], and plasma anodizing [10].More recently plasma acoustic emission metrology has been demonstrated on industrial scale APP reel-to-reel systems [11,12] and APPJ [13], all of which [11 -13] have used helium as the working gas.Experimental observations with physics based interpretation [3, 4, 5 and 6]; time series analysis [7, 8, and 9], neural network analysis [10], and multivariate analysis [11, 12 and 13] have been used to investigate the plasma acoustic emission in an attempt to isolate the specific origin of acoustic emission. In all case it has been observed that the emission signal is complex with parts of the signal associated with specific sources. Eller and Valdivia [14] have developed a multiple frequency ap...