Ultrathin complex oxide nanomechanical resonators

Abstract

Complex oxide thin films and heterostructures exhibit a profusion of exotic phenomena, often resulting from the intricate interplay between film and substrate. Recently it has become possible to isolate epitaxially grown single-crystalline layers of these materials, enabling the study of their properties in the absence of interface effects. In this work, we create ultrathin membranes of strongly correlated materials and demonstrate top-down fabrication of nanomechanical resonators made out of SrTiO 3 and SrRuO 3 . Using laser interferometry, we successfully actuate and measure the motion of the nanodrum resonators. By measuring their temperature-dependent mechanical response, we observe signatures of structural phase transitions in SrTiO 3 , which affect the strain and mechanical dissipation in the resonators. This approach can be extended to investigate phase transitions in a wide range of materials. Our study demonstrates the feasibility of integrating ultrathin complex oxide membranes for realizing nanoelectromechanical systems on arbitrary substrates.