“…To date, the realization of ultrathin (~sub-30 nm) InAs NWs was primarily achieved by vapor-liquid-solid (VLS) growth processes using foreign catalysts, amongst which gold (Au) [11][12][13][14][15][16][17] and other metals such as Ag [18] and Ni [19] have been used. A common problem encountered in direct growth from metal catalysts is the typically large diameter and length distribution [13][14][15][16][17][18][19] and non-epitaxial growth [13,18,19]. In addition, Au catalysts, which are most heavily used, are incompatible with Si-based CMOS technology due to deep level traps they form in the band gap of Si [20].…”