Ultrathin Silicon Nanomembrane in a Tubular Geometry for Enhanced Photodetection

Xu, Changhao; Pan, Rui; Guo, Qinglei; Wu, Xiang; Li, Gongjin; Huang, Gaoshan; An, Zhenghua; Li, Xiuling; Mei, Yongfeng

doi:10.1002/adom.201900823

Cited by 16 publications

(22 citation statements)

References 39 publications

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“…[14] The large-scale integration using rollingbased direct-transfer printing method has paved the way to mass produce these high-performance flexible and hybrid devices. [15] Broadband membrane photodetectors (PDs) are among the successfully implemented devices achieved using multiple materials including Si, [16,17] Ge, [18][19][20] SiGe, [21] InP, [22] InGaAs, [23] and Sb-based superlattices. [10,24] However, while these devices mainly operate at near infrared (NIR) and short-wave infrared (SWIR) wavelengths or at a longer THz wavelengths, developing membrane PDs operating in the mid-infrared (MIR) range has been severely limited by the lack of suitable material systems.…”

Section: Introductionmentioning

confidence: 99%

All‐Group IV Transferable Membrane Mid‐Infrared Photodetectors

Atalla

Assali

Attiaoui

et al. 2020

Adv Funct Materials

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Semiconductor membranes emerged as a versatile class of nanomaterials to control lattice strain and engineer complex heterostructures enabling a variety of innovative applications. With this perspective, herein this platform is exploited to tune simultaneously the lattice parameter and bandgap energy in group IV GeSn semiconductor alloys. As Sn content is increased to reach a direct bandgap, these semiconductors become metastable and typically compressively strained. It is shown that the relaxation in released membranes extends the absorption wavelength range deeper in the mid-infrared. Fully released Ge 0.83 Sn 0.17 membranes are integrated on silicon and used in the fabrication of broadband photodetectors operating at room temperature with a record wavelength cutoff of 4.6 µm, without compromising the performance at shorter wavelengths down to 2.3 µm. These membrane devices are characterized by two orders of magnitude reduction in dark current as compared to as-grown strained epitaxial layers. A variety of experimental tools and optimized calculations are used to discuss the crystalline quality, composition uniformity, lattice strain, and the electronic band structure of the investigated materials and devices. The ability to engineer all-group IV transferable mid-infrared photodetectors lays the groundwork to implement scalable and flexible sensing and imaging technologies exploiting these integrative, silicon-compatible strained-relaxed GeSn membranes.

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Section: Introductionmentioning

confidence: 99%

All‐Group IV Transferable Membrane Mid‐Infrared Photodetectors

Atalla

Assali

Attiaoui

et al. 2020

Adv Funct Materials

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“…The fabrication of the monolayer graphene microtubes is based on rolling-up nanotechnology. 20 First, polycrystalline monolayer graphene was grown on a 4-in. Ge(111) wafer through chemical vapor deposition.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

Self-Rolling of Monolayer Graphene for Ultrasensitive Molecular Sensing

Tian

et al. 2021

ACS Appl. Mater. Interfaces

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The controllable manipulation of graphene to create three-dimensional (3D) structures is an intriguing approach for favorably tuning its properties and creating new types of 3D devices. However, due to extremely low bending stiffnesses, it is rather challenging to construct monolayer graphene into stable 3D structures. Here, we demonstrate the stable formation of monolayer graphene microtubes with accompanying pre-patterned strain layers. The diameter of graphene microtubes can be effectively tuned by changing the thickness of the strain layers. Benefiting from a high surface-to-volume ratio of the tubular geometry, the 3D geometry leads to a prominent Raman enhancement, which was further applied to molecular sensing. The R6G molecules on graphene microtubes can be detected even for a concentration as low as 10–11 M. We believe that this method can be a generalized way to realize the 3D tubular structure of other 2D materials.

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“…Another kind of 3D mesostructure was fabricated using an innovative rolled-up nanotechnology to form 3D tubular micro/nanostructures by rolling ultra-thin Si NMs. Xu et al demonstrated 3D tubular Si photodetectors with enhanced broadband photodetection and responsivity using self-rolling ultra-thin Si NMs [137]. This unique 3D structured device and its performance are presented in Fig.…”

Section: Stretchable Electronicsmentioning

confidence: 99%

Si nanomebranes: Material properties and applications

2021

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Silicon (Si) has widely been used as an essential material in the modern semiconductor industry. Recently, new attempts have been actively made to apply Si to a variety of fields such as flexible electronic devices and biosensors by manufacturing Si nanomembranes (NMs) having nanometer thickness. In particular, as the thickness of Si is reduced to a nanometer scale, its mechanical, electrical, and optical properties differ from that of its bulk form, which provides opportunities for the development of new conceptual devices. In this review, we present recent advances in Si NM technology that exhibit functional features different from the bulk materials. In addition, we discuss the opportunities and current challenges related to this field. KEYWORDSSi nanomebranes, flexible electronics, bio-integrated electronics, Si optoelectronics, strain engineering Fabrication of Si nanomenbranesSi being a traditional semiconductor, is widely available for scientific and manufacturing purpose, in the form of rigid and brittle wafers. To fabricate mechanically flexible and stretchable Si membranes having thickness of few nanometers is, however, quite a challenging task. Flexible and stretchable silicon nanomembranes are fabricated by using the following

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Ultrathin Silicon Nanomembrane in a Tubular Geometry for Enhanced Photodetection

Cited by 16 publications

References 39 publications

All‐Group IV Transferable Membrane Mid‐Infrared Photodetectors

All‐Group IV Transferable Membrane Mid‐Infrared Photodetectors

Self-Rolling of Monolayer Graphene for Ultrasensitive Molecular Sensing

Si nanomebranes: Material properties and applications

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