2016
DOI: 10.1088/0957-4484/27/47/475504
|View full text |Cite
|
Sign up to set email alerts
|

Ultrathin thermoacoustic nanobridge loudspeakers from ALD on polyimide

Abstract: The recent development of low-temperature (<200 °C) atomic layer deposition (ALD) for fabrication of freestanding nanostructures has enabled consideration of active device design based on engineered ultrathin films. This paper explores audible sound production from thermoacoustic loudspeakers fabricated from suspended tungsten nanobridges formed by ALD. Additionally, this paper develops an approach to lumped-element modeling for design of thermoacoustic nanodevices and relates the near-field plane wave model o… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
5
0

Year Published

2017
2017
2023
2023

Publication Types

Select...
8
2

Relationship

0
10

Authors

Journals

citations
Cited by 13 publications
(5 citation statements)
references
References 37 publications
0
5
0
Order By: Relevance
“…In terms of applications, this has been its principle distinction from other generation mechanisms. It has been observed in many thin film conductors 15 including graphene 610 , reduced graphene oxide 11, 12 and graphene foams 13, 14 . The exceptionally high thermal conductivity 15 and low heat capacity 16 of graphene make it the quintessential material for investigating thermoacoustics.…”
Section: Introductionmentioning
confidence: 99%
“…In terms of applications, this has been its principle distinction from other generation mechanisms. It has been observed in many thin film conductors 15 including graphene 610 , reduced graphene oxide 11, 12 and graphene foams 13, 14 . The exceptionally high thermal conductivity 15 and low heat capacity 16 of graphene make it the quintessential material for investigating thermoacoustics.…”
Section: Introductionmentioning
confidence: 99%
“…Regarding thin metal film heaters and underlying thermal insulators, many studies have been conducted by using varied combinations: suspended Al wires-air (Niskanen et al, 2009), Si nanowires-polymer or -glass (Tian et al, 2011a), indium-tin-oxide film-glass (Daschewski et al, 2015), Si nanoparticles-sapphire (Odagawa et al, 2010), conducting polymers-glass (Tian et al, 2011b), thin Au film-porous polymer (Chitnis et al, 2012), thin Ag–Pd film-glass-Al 2 O 3 (Nishioka et al, 2015), carbon nanotube (CNT)-air (Xiao et al, 2011), or -grooved Si (Wei et al, 2013), graphene-polymer (Suk et al, 2012; Tian et al, 2014; Kim et al, 2016; Tao et al, 2016; Sbrockey et al, 2018), -porous Al 2 O 3 (Tian et al, 2012), or -glass (Fei et al, 2015), CNT-laser-scribed graphene-polymer (Yeklangi et al, 2018), and W-Al 2 O 3 -polymer (Brown et al, 2016). The basic characteristics of these devices are consistent with the theoretical analyses of the thermo-acoustic effect and its key factors (Hu et al, 2010, 2012a,b, 2014; Vesterinen et al, 2010; Daschewski et al, 2013; Lim et al, 2013; Yang and Liu, 2013; Wang et al, 2015; Tong et al, 2017; Xing et al, 2017).…”
Section: Emissive Properties and Applicationsmentioning
confidence: 99%
“…However, most of these prior numerical modeling efforts stem from the need to represent their empirical experimental data in a reduced form. Therefore, they typically omit various physics in the simulation environment, which are shown to play a potentially important role under different investigations (Aliev et al, 2018;Brown et al, 2016). Instead of relying on these simplification-driven paradigms and toward creating a generalized bottom-up approach, the paper authored by Guiraud et al (2019a) proposes a novel modular framework that can describe an arbitrary multi-layered thermophone device, where each layer is either a solid or a fluid.…”
Section: Introductionmentioning
confidence: 99%