Ultrathin wear-resistant coatings for the tape bearing surface of thin-film magnetic heads for digital compact cassette

Influence of deposition parameters on mechanical properties of sputter-deposited Cr2O3 thin films

“…4 Nevertheless, Cr 2 O 3 coatings have already found several applications e.g. as protective coatings on read-write heads in digital magnetic recording units 5 or in gas-bearing applications. 3 The present study investigates the influence of deposition parameters, namely the substrate temperature and the oxygen content in the sputtering gas, on the mechanical properties of Cr 2 O 3 thin films.…”

Control of the optical properties of silicon and chromium mixed oxides deposited by reactive magnetron sputtering

“…This makes it an optimum material to be included in mixed thin films used, for example, for tribological applications (protective coatings), optical applications (solar absorber materials), microelectronic applications, etc. [37][38][39][40]. Apart from this, both planar electronics processing and the modern integrated-circuit industry have been made possible by the unique properties of silicon oxide (SiO 2 ), the only native oxide of a common semiconductor which is stable in water and at elevated temperatures, an excellent electrical insulator, a mask to common diffusing species, and capable of forming a nearly perfect electrical interface with its substrate [41,42].…”