Ultratrace determination of phosphorus in ultrapurified water by a slope comparison method

Sabarudin, Akhmad; Oshima, Mitsuko; Motomizu, Shoji

doi:10.1016/s0003-2670(03)00082-5

Cited by 15 publications

(14 citation statements)

References 14 publications

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“…The unavailability of a standard reference material for ultrapurified water, which has a certified phosphorus value, made it difficult to assess the accuracy of these results. However, compared with a reference, 3 where phosphorus in ultrapurified water was found to be about 2 × 10 -9 M, the results obtained by the proposed method with fluorescence quenching/FIA method were comparable.…”

Section: Determination Of Phosphorus In Ultrapurified and Purified Wamentioning

confidence: 56%

“…This is why a several-fold enrichment method for phosphorus determination in the ultrapurified water samples, which is also used as a carrier, without the addition of any reagents was adopted in this study, as well as in a previous analysis of ultrapurified water. 2,3,22,23 During the evaporation of samples, some elements in the samples may be lost because of vaporization of the elements to the air, such as Ti, Ge and Sb. 23,24 To make sure that phosphorus would not be lost during the evaporation/preconcentration step, the recovery test of phosphorus in the evaporation step was examined and the obtained results are given in Table 4.…”

Section: Determination Of Phosphorus In Ultrapurified and Purified Wamentioning

confidence: 99%

“…3 The phosphomolybdenum blue method, either with or without solidphase enrichment, has often been used for phosphorus and silicate determination, 4-8 though the procedures are sometimes troublesome and time-consuming, for improving the sensitivity they need filtration/collection procedures with membrane filters. Sensitive spectrophotometric and fluorometric methods based on ion-associate formation deserve much attention.…”

Section: Introductionmentioning

confidence: 99%

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Trace and Ultratrace Analysis of Purified Water Samples and Hydrogen Peroxide Solutions for Phosphorus by Flow-Injection Method

Oshima

Sabarudin

et al. 2005

ANAL. SCI.

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IntroductionNowadays, especially in semiconductor industries, large amounts of ultrapurified chemicals, such as water, hydrogen peroxide, acids, and bases, are required for manufacturing highquality semiconductors in microelectronic industries. 1 The use of ultrapurified chemicals can help to fulfill two main objectives, namely the production of high-quality products and the minimization of rejects.2 Consequently, there has been a growing demand for the sensitive and accurate determination of trace and ultratrace amounts of impurities, such as boron, phosphorus and silicon, in ultrapurified chemicals. In general, such nonmetallic elements/compounds are less sensitive to conventional atomic spectroscopic methods, such as AAS, ICP-AES and ICP-MS. For example, the limits of detection (LOD) of silicate and phosphate in ICP-MS, which is known to be one of the most sensitive instruments and is often used in semiconductor analysis, are about 1 ppb or larger. Therefore, its sensitivity is not sufficient for the determination of a sub-ppb or ppt level of such non-metallic substances.The determination of trace and ultratrace amounts of phosphorus has become more and more important in such fields as semiconductor industry, ultrapurified chemicals (UPC) and ultrapurified water (UPW) manufactures etc. 3 The phosphomolybdenum blue method, either with or without solidphase enrichment, has often been used for phosphorus and silicate determination, 4-8 though the procedures are sometimes troublesome and time-consuming, for improving the sensitivity they need filtration/collection procedures with membrane filters. Sensitive spectrophotometric and fluorometric methods based on ion-associate formation deserve much attention. Molybdophosphate forms ion-association complexes with bulky cationic or basic dyes, which are the basis of sensitive detection methods for determining phosphorus spectrophotometrically. Malachite Green has found the widest application.9-15 Motomizu et al. [16][17][18] have reported a highly sensitive spectrophotometric method for determining phosphorus at sub-ppb and ppt levels using relatively small volumes of the sample solutions, an organic solvent (methyl cellosolve: MC), and a tiny membrane filter for collecting the ion associate of molybdophosphate with Malachite Green. The absorbance of the collected ion associate dissolved in MC was measured by an off-line flow injection-spectrophotometric detection method, which is relatively simple and shows excellent sensitivity. However, the collection/concentration procedure with a tiny membrane filter and dissolution of the ion associate in MC is troublesome and time-consuming.Highly sensitive fluorescence quenching methods for the determination of phosphate coupled with a flow-injection technique were also reported. These methods are based on the formation of an ion associate of molybdophosphate with Rhodamine 6G. 19,20 They are very sensitive with a detection limit of 0.1 ppb, 19 though the prepared reagent solution was not stable. Later, a method with Rhodamine...

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Section: Determination Of Phosphorus In Ultrapurified and Purified Wamentioning

confidence: 56%

Section: Determination Of Phosphorus In Ultrapurified and Purified Wamentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Trace and Ultratrace Analysis of Purified Water Samples and Hydrogen Peroxide Solutions for Phosphorus by Flow-Injection Method

Oshima

Sabarudin

et al. 2005

ANAL. SCI.

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“…Oxalic acid can react with the excess of molybdate to form colorless molybdenum oxalate without affecting the molybdosilicate formation. 0.006 mol dm -3 of oxalic acid was found sufficient for the elimination of the effect of phosphate which is reported to be present at about 0.06-0.07 ppb as phosphorus in ultrapurified water [15].…”

Section: Experimental Variables For the Formation Of Ion Associationmentioning

confidence: 83%

Novel flow injection-fluorometric method for the determination of trace silicate and its application to ultrapurified water analysis

Sabarudin¹

2003

Talanta

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A highly sensitive fluorescence quenching method for the determination of silicate based on the formation of an ion associate between molybdosilicate and Rhodamine B (RB) in nitric acid medium was developed. A flow injection system coupled with a fluorescence detector was used for the measurement of fluorescence intensity at 560 nm and 580 nm as excitation and emission wavelengths, respectively. The calibration graph for Si showed a linear range of 0.1 -5 ng cm -3 with correlation coefficient of 0.9989, and the detection limit of 0.06 ng cm -3 . The proposed method was successfully applied to the determination of silicate in ultrapurified water with satisfactory results.

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“…Dilutions generated based on the proportion of samples are critical to malachite green method determinations, as they alter the method's sensitivity by changing the ion-study solution ratio, as observed by Sabarudin et al (2003), who used a mixed solution of molybdate and malachite green to determine very low P levels in water.…”

Section: Methodsmentioning

confidence: 99%

Inorganic phosphorus fractions extracted by sodium dithionite-citrate-bicarbonate and determined using the malachite green method

Guedes¹,

Fernandes²,

Alleoni³

et al. 2015

Rev. Ciênc. Agrár.

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Phosphorus (P) fractionation is a common tool used in studies on soil P dynamics. However, the P fraction extracted by sodium dithionite-citrate-bicarbonate (DCB), occluded in iron oxides (P-occluded), is difficult to quantify. This study presents an alternative and simpler method for the quantification of the P-occluded fraction extracted by DCB. Samples were collected from a clayey Oxisol at a depth of 0-0.2 m. The extraction method followed the procedure described by Zhang and Kovar and malachite green method was used for determination. The malachite green method produced satisfactory quantification results, and it revealed a pattern that represents extract P concentrations according to the absorbance level. The method is suitable for simple determinations of P occluded in extracts of DCB. RESUMO: O fracionamento de fósforo (P) é uma das principais ferramentas nos estudos sobre a dinâmica de P no solo. Entretanto, a fração de P extraído por ditionito-citrato-bicarbonato de sódio (DCB), ocluso em óxidos de ferro (P-ocluso) tem apresentado problemas para a sua quantificação. O objetivo foi propor método alternativo e mais simples para a quantificação

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Ultratrace determination of phosphorus in ultrapurified water by a slope comparison method

Cited by 15 publications

References 14 publications

Trace and Ultratrace Analysis of Purified Water Samples and Hydrogen Peroxide Solutions for Phosphorus by Flow-Injection Method

Trace and Ultratrace Analysis of Purified Water Samples and Hydrogen Peroxide Solutions for Phosphorus by Flow-Injection Method

Novel flow injection-fluorometric method for the determination of trace silicate and its application to ultrapurified water analysis

Inorganic phosphorus fractions extracted by sodium dithionite-citrate-bicarbonate and determined using the malachite green method

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