2003
DOI: 10.1063/1.1629784
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Ultraviolet amplified spontaneous emission from zinc oxide ridge waveguides on silicon substrate

Abstract: Zinc oxide (ZnO) thin-film waveguides with ridge structures have been fabricated on n-type (100) silicon substrates. The deposition of high-crystal-quality ZnO thin films on the lattice-mismatched silicon substrate was achieved by using the filtered cathodic vacuum arc technique. A ridge structure is defined on the ZnO thin film by plasma etching. Room temperature amplified spontaneous emission with peak wavelength at 385 nm is observed under 355 nm optical excitation. The pump threshold is found to be around … Show more

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Cited by 59 publications
(46 citation statements)
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“…This is because the silicon substrate allows the integration of II-VI optoelectronics with silicon-based electronics, but in addition, a silicon substrate is cheaper and easier to cleave than that of sapphire. Therefore, the successful deposition of device quality ZnO thin films on silicon substrates lead to the mass production of UV integrated optoelectronics [6]. The work reported on the effect of surface microstructure on structure, optical, and luminescence properties is meager.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…This is because the silicon substrate allows the integration of II-VI optoelectronics with silicon-based electronics, but in addition, a silicon substrate is cheaper and easier to cleave than that of sapphire. Therefore, the successful deposition of device quality ZnO thin films on silicon substrates lead to the mass production of UV integrated optoelectronics [6]. The work reported on the effect of surface microstructure on structure, optical, and luminescence properties is meager.…”
Section: Introductionmentioning
confidence: 99%
“…It is a wide direct band gap (3.32 eV) material and finds applications in fabrication of transparent conducting oxides for flat panel displays and solar cells [1], and thin film transistors [2,3]. Moreover, ZnO acts as good sensor in detecting various gases [4,5] and also acts as optical wave guide [6]. Thin films of ZnO were deposited by various physical [7][8][9][10] and chemical techniques [11][12][13][14].…”
Section: Introductionmentioning
confidence: 99%
“…ZnO also exhibits strong piezoelectric and pyroelectric properties and is ideally suitable for applications in sensors and actuators [10] . The electrical, optoelectronic, and photochemical properties of ZnO have resulted in its use for solar cells, transparent electrodes, and blue/UV light emitting devices [9,11] . The unique semiconducting and piezoelectric dual properties of ZnO may also be exploited for applications in mechanical energy and electrical power conversion.…”
Section: Introductionmentioning
confidence: 99%
“…Hierarchical structures such as nanotubes and nanowires [115] or ZnO nanoplate-nanowire architectures [116] have been studied as new directions for integrated device applications. In recent years, the ASE has been investigated in ZnO powders and patterned films as well with incoherent and coherent feedback in the gain media [117,118]. UV laser of ZnO has been observed in powder, thin-film, and nanowire samples based on the positive feedback in random and Fabry-Pérot cavities [119][120][121].…”
Section: Lasing Action In Znomentioning
confidence: 99%