1991
DOI: 10.1063/1.348880
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Ultraviolet induced transformation of polysiloxane films

Abstract: We have studied the transformation of a polysiloxane film induced by high temperature annealing and by 248 and 193 nm excimer laser irradiation. Auger electron and x-ray photoelectron spectroscopy have been used to study the Si, O, and C profiles and the Si-O valence band structure before and after transformation. We suggest that laser induced transformation results from localized heating and oxidation of the Si-O chains coupled with a breakdown and oxidation of previously attached benzene groups into volatile… Show more

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Cited by 28 publications
(23 citation statements)
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“…[10] In the present work, we extend the systematic study of how PHMS surfaces can be modified with respect to chemical composition and wettability, by exploring the influence of O 2 -plasma treatments. The motivation for this work is manifold: we wanted to prepare a material which (i) can be deposited as a thin film with high (close to atomic) smoothness; (ii) whose wettability properties can be modified from hydrophobic to fully wetting, without affecting the film smoothness significantly; (iii) as limit case, has SiO x (x ≈ 2) like character; and (iv) where these properties can be maintained over relevant experimental or application times (aging aspects).…”
Section: Introductionmentioning
confidence: 99%
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“…[10] In the present work, we extend the systematic study of how PHMS surfaces can be modified with respect to chemical composition and wettability, by exploring the influence of O 2 -plasma treatments. The motivation for this work is manifold: we wanted to prepare a material which (i) can be deposited as a thin film with high (close to atomic) smoothness; (ii) whose wettability properties can be modified from hydrophobic to fully wetting, without affecting the film smoothness significantly; (iii) as limit case, has SiO x (x ≈ 2) like character; and (iv) where these properties can be maintained over relevant experimental or application times (aging aspects).…”
Section: Introductionmentioning
confidence: 99%
“…[7 -9] Another established way of converting such films to silica (SiO 2 ) is by purely thermal treatment in an oxidizing atmosphere. [10] This requires temperatures above 1000…”
Section: Introductionmentioning
confidence: 99%
“…Cross‐linked poly(siloxane)s possess unique mechanical, nearly ideal elastomer and optical properties, low weight, high durability, high gas permeability and excellent water repellency 177,178. The modification of the hydrophobic PDMS to hydrophilic SiO x opens an additional wide range of applications i.e., in microelectronics179–181 and coating technology for medical devices 182–184. Transformation of PDMS into a SiO x structure has been achieved by irradiation with a Xe 2 excimer lamp at 172 nm in air 172–174.…”
Section: Discussionmentioning
confidence: 99%
“…UV-laser treatment of silicone materials has been studied at wavelengths of 193 nm, 248 nm, and 266 nm [Hogan and Lunney (1988), Joubert et al (1991), Graubner et al (2002), Rubahn et al (2004), Graubner et al (2006)]. The laser modification results of silicone at three wavelengths have been compared by Okoshi et al (2009): irradiation at 266 nm leads to the formation of carbon; irradiation at 193 nm leads to a luminescent material (defective SiO x ) [Okoshi et al (2007)], and at 157 nm the resulting material is SiO 2 .…”
Section: Introductionmentioning
confidence: 99%