“…Generally, a gas sensor consists of gas-sensitive films and gas sensor substrate with electrodes, a package, and front-end electronic circuits. The gas-sensitive layer can be realized based on various materials, including organic compounds (e.g., phthalocyanines [2,3]) and metal oxides [4] (e.g., WO 3 [5,6], TiO 2 [7,8], SnO 2 [9,10], In 2 O 3 [11,12], Fe 2 O 3 [13,14], MoO 3 [13,15], ZnO [16][17][18], CuO [19][20][21][22][23][24][25][26][27][28]). The most common methods for metal oxide depositions are magnetron sputtering [29,30], sol-gel [31,32], thermal oxidation [33,34], hydrothermal techniques [35,36], the spray pyrolysis technique [37,38], and the microwave-assisted method [39,40].…”