2001
DOI: 10.1016/s0040-6090(01)01355-4
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Ultraviolet radiation induced degradation of poly-para-xylylene (parylene) thin films

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Cited by 46 publications
(47 citation statements)
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“…In the region of the carbonyl stretching vibration the bands at 1700, 1718, 1690 cm À1 can be assigned to C]O groups in various chemical bonding environment, i.e. aldehydes, esters, and carboxylic acids [48,50,49]. The two bands at 1608 and 1574 cm À1 indicate modification in the ring substitutions, whereby the aromatic units lose their symmetry [50,48].…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…In the region of the carbonyl stretching vibration the bands at 1700, 1718, 1690 cm À1 can be assigned to C]O groups in various chemical bonding environment, i.e. aldehydes, esters, and carboxylic acids [48,50,49]. The two bands at 1608 and 1574 cm À1 indicate modification in the ring substitutions, whereby the aromatic units lose their symmetry [50,48].…”
Section: Resultsmentioning
confidence: 99%
“…aldehydes, esters, and carboxylic acids [48,50,49]. The two bands at 1608 and 1574 cm À1 indicate modification in the ring substitutions, whereby the aromatic units lose their symmetry [50,48]. These bands are characteristic of disubstituted benzenes that contain groups in the para position with different Hammett constants [51].…”
Section: Resultsmentioning
confidence: 99%
“…In vacuum, parylenes are stable to radiation (UV light, X-and c-rays) [27]. However, in air, exposing such thin films to UV radiation (k > 250 nm) can deteriorate the thermal stability and electrical properties through photochemical oxidation mechanisms [28]. Because of its high molecular weight ($500 kDa), Py-C has a high threshold temperature ($90°C), therefore is much easier to grow as a thin film.…”
Section: Methodsmentioning
confidence: 99%
“…6(a) shows much lower content of C (carbon) and O (oxygen) on lead frame of LED deposited parylene C, Fig. 6(b) shows much higher content of C (carbon) and O (oxygen) on the lead frame of LED without parylene C, elements content percentage of C and O above 20 and 30%, as silver glue is content of Ag and LED may fail due to the oxidation and chip lifted off; significant improvement of oxygen and water barrier properties compared to bare silicone encapsulation [18][19][20]. …”
Section: Samplementioning
confidence: 99%