“…β-Ga 2 O 3 is an important candidate semiconductor material for next-generation power electronic devices and solar-blind ultraviolet photodetectors, due to its ultra-wide bandgap, high critical electric breakdown field, and large Baliga's figure of merit [1-4]. In the past few years, high-performance β-Ga 2 O 3 -based devices including Schottky barrier diode (SBD) [5,6], pn diode [7,8], metal-oxide-semiconductor field-effect transistor (MOSFET) [9,10], and photodetector [11][12][13][14][15][16] have been quickly demonstrated, in which high-quality epitaxial films are of crucial importance [6,7,9]. One of the most important methods to obtain epitaxial β-Ga 2 O 3 films is metalorganic chemical vapor deposition (MOCVD), thanks to its fast growth rate, large area homogeneity, and superb film quality [17][18][19][20].…”