2017
DOI: 10.3390/coatings7080128
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Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings

Abstract: Abstract:Residual stresses of physical vapor deposition (PVD) hard coatings can be measured using X-ray diffraction (XRD) methods under either conventional d-sin 2 ψ mode or glancing incident (GIXRD) mode, in which substantial uncertainties exist depending on the applied diffraction parameters. This paper reports systematic research on the effect of the two analytical modes, as well as the anisotropic elastic modulus, on the measured residual stress values. A magnetron sputtered TiN grown on hardened tool stee… Show more

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Cited by 32 publications
(16 citation statements)
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References 33 publications
(87 reference statements)
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“…39 Minor shifts in the main β-SiC peak are likely a result of differences in lattice strain. 40 Similarly, the breadth of the main β-SiC peak in Hi-Nicalon may be a result of slight differences in crystallite size compared to the other two fibers. All three fibers show unidentified peaks at around 29 o (2θ) (see Figure 2), likely corresponding to substrate material.…”
Section: Resultsmentioning
confidence: 99%
“…39 Minor shifts in the main β-SiC peak are likely a result of differences in lattice strain. 40 Similarly, the breadth of the main β-SiC peak in Hi-Nicalon may be a result of slight differences in crystallite size compared to the other two fibers. All three fibers show unidentified peaks at around 29 o (2θ) (see Figure 2), likely corresponding to substrate material.…”
Section: Resultsmentioning
confidence: 99%
“…stresses of thin films and coatings [1][2][3][4][5][6][7][8]. The solution of the linear regression is provided in Eq.…”
Section: Conventional Approach To Measure Residual Normal Stressmentioning
confidence: 99%
“…X-ray diffraction (XRD) is a powerful analytical tool in characterising polycrystalline materials owing to its accurate measurement of lattice d-spacings. An important application has been the quantitative determination of surface residual stresses, in which d ~ sin 2 ψ linear regression is the mostly used method [1][2][3][4][5][6][7][8]. The conventional d ~ sin 2 ψ method is suitable for measuring in-plane normal stresses (i.e., zero normal stress vertical to the measured surface) if the related residual shear stresses can be ignored.…”
Section: Introductionmentioning
confidence: 99%
“…The residual stress was determined using the XRD method. 4,12,13 When X-rays penetrate both the glass coating and the surface layer of the iron (Fe) in stainless steels, the characteristic XRD patterns were obtained for the residual stress estimation described as follows.…”
Section: Sealing Performancesmentioning
confidence: 99%