Uncertainty quantification on small angle x-ray scattering measurement using Bayesian deep learning

Abstract

Small angle x-ray scattering (SAXS) is a widely recognized solution for measuring complex nanostructures. With the increasing demand for accurately assessing structural characteristics and optimizing manufacturing processes, uncertainty quantification in SAXS inverse problems has become a critical issue. However, traditional methods face challenges such as slow computation speed and inaccurate estimation of multidimensional parameters. To overcome these issues, we propose an uncertainty quantification approach suitable for SAXS measurement that approximates the posterior using Bayesian deep learning. The effectiveness and reliability of our method are illustrated by assessing structural parameters of synthetic 2D Si grating samples. The uncertainty quantification takes only about 2.3 s, thousands of times faster than the conventional Markov Chain Monte Carlo (MCMC) methods. Also, our method has superior repeatability for parameter measurement compared to the MCMC approaches. It provides the potential of efficient and reliable SAXS measurement in increasingly intricate semiconductor manufacturing.