Unconventional Lens Design

Mulvey, T.

doi:10.1007/978-3-642-81516-4_5

Cited by 28 publications

(17 citation statements)

References 12 publications

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“…A single pole lens which is placed below the specimen is suitable for this purpose. The use of this type of single pole lens in the SEM was first proposed by Mulvey (1982). In Figure 1, the lens is located outside the vacuum region.…”

Section: The Basic Designmentioning

confidence: 99%

Scanning electron microscope design for quantitative multicontrast

Khursheed

1996

Scanning

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Summary: Conceptual designs of scanning electron microscopes (SEMs) using a time-of-flight electron spectrometer are presented. The procedure for making quantitative measurements with such SEMs is shown to be much simpler and versatile than using conventional SEMs. SEMs which use an electron time-of-flight spectrometer are able to operate as multicontrast analytical probes, capable of simultaneously quantifying surface topography, voltage, and material type. In addition, it is demonstrated that these SEMs can be designed to have high spatial resolution, good signal-to-noise characteristics, and to be of compact table-top size.

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Section: The Basic Designmentioning

confidence: 99%

Scanning electron microscope design for quantitative multicontrast

Khursheed

1996

Scanning

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“…provide a strong concentration of magnetic field near specimens, and can therefore reduce the spherical aberration (Mulvey, 1982). A typical snorkel lens, with a hemispherical snout, is shown in Fig.…”

Section: Snorkel Lens With Spherical Snout Snorkel Lenses Canmentioning

confidence: 99%

Second‐order finite element method and its practical application in charged particle optics

Zhu¹,

Munro²

1995

Journal of Microscopy

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The first-order finite element method (FOFEM) has been widely used in computing electrostatic and magnetic fields of lenses and deflectors. With the increasing requirement of high-accuracy field computation and the advances in the power of computers, the second-order finite element method (SOFEM), which will be demonstrated in this paper to be more accurate than FOFEM, is becoming necessary and practical. In this paper, the concept of SOFEM will be described. Several applications of SOFEM in charged p-article optics will also be illustrated, such as the simulation ' of electrostatic and magnetic lenses and deflectors, the modelling of electron and ion sources, and the evaluation of high-order geometric and chromatic aberrations of charged particle columns.

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“…There is no Although iron-free lenses have some technical problems, they may still have a role to play when the need for space around the specimen is paramount (Hawkes & Valdrg, 1977). Tape coils made from copper insulated by a thin Mylar tape can be constructed with high symmetry and produce high flux density when operated at current densities of the order of 104A/cmZ (Mulvey, 1982). We have investigated practical iron-free lenses as condenserobjectives, concentrating especially on the use of a suitably water-cooled copper tape coil operated at a current density of g = 20000A/cmZ.…”

Section: Iron-free Condenser-objective Designmentioning

confidence: 99%