Uncooled IR imager with 5-mK NEDT

Amantea, R.; Knoedler, C. M.; Pantuso, Francis P.; Patel, Vipulkumar K.; Sauer, Donald J.; Tower, John R.

doi:10.1117/12.280340

Cited by 36 publications

(21 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The extent of bending is directly proportional to the radiation intensity. Previous work has shown that microcantilever bending can be detected with extremely high sensitivity [9][10][11][12][13][14][15][16]. For example, metal-coated microcantilevers that are commonly employed in atomic force microscopy (AFM) allow sub-Angstrom (< 10 -10 m) sensitivity to be routinely obtained.…”

Section: Microcantilever Thermal Detectormentioning

confidence: 99%

“…Presently, there is a number of families of commercially available IR detectors, including thermopiles, bolometers, pyroelectrics, and various solid state detectors [3][4][5][6][7][8][9][10][11][12]. In this work, we employed inexpensive micromechanical IR thermal detectors; microcantilever technology is used which is based on the bending of a microcantilever as a result of absorption of IR energy [9][10].…”

Section: Microcantilever Thermal Detectormentioning

confidence: 99%

See 1 more Smart Citation

Microsensors for In-Situ, Real-Time Detection and Characterization of Toxic Organic Substances

Rajic¹

2001

View full text Add to dashboard Cite

Section: Microcantilever Thermal Detectormentioning

confidence: 99%

Section: Microcantilever Thermal Detectormentioning

confidence: 99%

Microsensors for In-Situ, Real-Time Detection and Characterization of Toxic Organic Substances

Rajic¹

2001

View full text Add to dashboard Cite

“…Table 3 summarizes the NEDT values modelled for various noise sources with different pixel structures [40]. Microcantilever IR detectors can have NEDT as small as 5 mK for 50 μm square pixels using silicon nitride for isola− tion [21]. Modelling the performance of microcantilever sensor, structures with pixel pitches down to 17 μm indi− cates NEDTs < 20 mK and time constants in the 5−ms range are feasible with this technology [40].…”

Section: Electrically-coupled Cantileversmentioning

confidence: 99%

“…Between them, the most important are bimaterial microcantilevers that mechanically respond to the absorp− tion of the radiation. These sensing structures were origi− nally invented at the Oak National Laboratory (ORNL) in the mid 1990's [11][12][13][14][15], and subsequently developed by ONRL [16][17][18][19][20], the Sarnoff Corporation [21,22], Sarcon Microsystems [23][24][25] and other for imaging [26][27][28][29][30][31][32][33] and photo spectroscopic applications [34,35].…”

Section: Thermomechanical Detector Approachmentioning

confidence: 99%

Novel uncooled infrared detectors

Rogalski

2010

Opto-Electronics Review

View full text Add to dashboard Cite

Despite successful commercialization of uncooled microbolometers suitable for imaging, the community is still searching for a platform for imagers that combine affordability, convenience of operation, and excellent performance. More recently, a new type of uncooled detectors based on expansion phenomena in micromechanical structures has been introduced. These detectors are essentially free of intrinsic electronic noise and can be combined with a number of different readout techniques including: capacitive, piezoresistive, electron tunnelling, and optical. In this paper, their design structures and performance are discussed in more detail.

show abstract

“…Figure 4 presents an overview of the most significant reported activities. [27,[35][36][37]. Despite first thermal imaging with a capacitive read microcantilever FPA, Sarcon's 2003 announced mar− ket entry of such camera was not realized, whereupon all investments were cancelled [38].…”

Section: Milestones Of Thermomechanical Ir Sensor Developmentmentioning

confidence: 99%

Microthermomechanical infrared sensors

Steffanson

Rangelow

2014

Opto-Electronics Review

View full text Add to dashboard Cite

We present a state-of-the-art overview of microthermomechanical infrared sensor technology. The working principle of this sensor is based on a bi-material actuated micromechanical deflection, generated by an induced temperature rise due to incident infrared radiation absorption. In order to generate a thermal image the thermomechanical deflections of the freestanding microstructures are read by either capacitive, piezoresistive or optical means. Research and development activities in this field began in the early 1990s. The development of this technology within the last 20 years has resulted in innovations such as uncooled multiband infrared detection, high-speed infrared sensing and uncooled THz imaging. This paper outlines representative milestones of this technology and analyses important results of notable groups. Significant activities on capacitive and optical readout techniques of thermomechanical infrared arrays are presented. Furthermore the advantages of microthermomechanical infrared sensors over current well-established uncooled infrared technologies are summarized. In conclusion the latest developments of this technology offer a highly potential solution for a variety of important energy-saving, safety and security applications.

show abstract

Uncooled IR imager with 5-mK NEDT

Cited by 36 publications

References 0 publications

Microsensors for In-Situ, Real-Time Detection and Characterization of Toxic Organic Substances

Microsensors for In-Situ, Real-Time Detection and Characterization of Toxic Organic Substances

Novel uncooled infrared detectors

Microthermomechanical infrared sensors

Contact Info

Product

Resources

About