Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range

Neumann, Norbert; Ebermann, Martin; Gittler, Elvira; Meinig, Marco; Kurth, Steffen; Hiller, Karla

doi:10.1109/icsens.2010.5690856

Cited by 14 publications

(7 citation statements)

References 6 publications

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“…19 The throughput in such cases is limited and the acquisition rate is suitable where only one or two wavelengths are of interest, limiting their application for measuring different spectral bands over a large spectral region. Recently, tunable infrared detectors have been demonstrated using micromachined Fabry-Perot filters 20 in the 3-5 µm spectral range with bandwidths close to 100 nm, but such devices are limited in the spectral range that could be spanned with a set and their fabrication can be cumbersome and expensive. Hence, technologies that are based on inexpensive components and are easy to deploy with common IR optical elements are still needed.…”

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confidence: 99%

Narrowband Midinfrared Reflectance Filters Using Guided Mode Resonance

Kodali

Schulmerich

et al. 2010

Anal. Chem.

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There is a need to develop mid-infrared (IR) spectrometers for applications in which the absorbance of only a few vibrational mode (optical) frequencies needs to be recorded; unfortunately, there are limited alternatives for the same. The key requirement is the development of a means to access discretely a small set of spectral positions from the wideband thermal sources commonly used for spectroscopy. We present here the theory, design and practical realization of a new class of filters in the mid-infrared (IR) spectral regions based on using guided mode resonances (GMR) for narrowband optical reflection. A simple, periodic surface-relief configuration is chosen to enable both a spectral response and facile fabrication. A theoretical model based on rigorous coupled wave analysis is developed, incorporating anomalous dispersion of filter materials in the mid-IR spectral region. As a proof-of-principle demonstration, a set of four filters for a spectral region around the C-H stretching mode (2600–3000 cm−1) are fabricated and responses compared to theory. The reflectance spectra were well-predicted by the developed theory and results were found to be sensitive to the angle of incidence and dispersion characteristics of the material. In summary, the work reported here forms the basis for a rational design of filters that can prove useful for IR absorption spectroscopy.

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confidence: 99%

Narrowband Midinfrared Reflectance Filters Using Guided Mode Resonance

Kodali

Schulmerich

et al. 2010

Anal. Chem.

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“…Our technology naturally results in a very small height and the optical axis in the wafer-normal direction. Among the related works to compare with, there are the TIR-FPI realizations based on MEMS mirrors on separate wafers then bonded into the complete device [3,4]. Comparable performance in similar footprint was achieved, but, compared with our single-wafer process, the final unit cost in a high-volume production remains a challenge.…”

Section: Background and Prior Artmentioning

confidence: 99%

Optical transmission performance of a surface-micromachined Fabry–Pérot interferometer for thermal infrared

Tuohiniemi

Blomberg

Akujärvi

et al. 2012

J. Micromech. Microeng.

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We developed a surface-micromachined tunable Fabry-Pérot interferometer for the thermal infrared spectral range of wavelengths 7-12 μm. In this paper, we present the device performance in terms of the optical transmission and the tunability. The device represents the first layout that proved successful in terms of the manufacturing process yield (about 80%). The optical transmission over the wavelengths from 3 to 20 μm is presented with the emphasis on analysing the first-order transmission peak. The transmission band width and the peak height are compared using the existing theory for this type of an interferometer. The deviation from an ideal performance is resolved and partly explained through the known structural unidealities.

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“…[ 16 ] Previous studies have also explored the miniaturization of microspectrometers for the near to mid‐infrared wavelength range using micro‐electromechanical systems (MEMS) technologies. These include voltage‐tunable Fabry–Pérot (FP) filters, [ 17,18 ] compact Michelson interferometers, [ 19 ] and tunable plasmonic metamaterials. [ 20 ] These methods have been proven to be effective, but the use of MEMS technologies also requires sophisticated fabrication processes.…”

Section: Introductionmentioning

confidence: 99%

Compact Chemical Identifier Based on Plasmonic Metasurface Integrated with Microbolometer Array

Meng

Weston

Balendhran

et al. 2022

Laser & Photonics Reviews

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The identification of chemicals from their mid-infrared spectra has applications that include industrial production of chemicals, food production, pharmaceutical manufacturing, and environmental monitoring. This is generally done using laboratory benchtop tools, such as the Fourier transform infrared spectrometer. Although such systems offer high performance, alternative platforms offering reduced size, weight, and cost can enable a host of new applications, e.g. in consumer personal electronics. Here a compact microspectrometer platform for chemical identification, comprising a mid-infrared metasurface integrated with a lightweight (≈1 g) and very small (≈1 cm 3 ) microbolometer-based thermal camera is experimentally demonstrated. A machine learning algorithm is trained to analyze the microspectrometer output and classify chemicals based on their mid-infrared fingerprints. High accuracy identification of four liquid chemicals, concentration quantification of ethyl lactate in cyclohexane down to subpercentage levels, and the classification of food and drug samples is demonstrated.

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Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range

Cited by 14 publications

References 6 publications

Narrowband Midinfrared Reflectance Filters Using Guided Mode Resonance

Narrowband Midinfrared Reflectance Filters Using Guided Mode Resonance

Optical transmission performance of a surface-micromachined Fabry–Pérot interferometer for thermal infrared

Compact Chemical Identifier Based on Plasmonic Metasurface Integrated with Microbolometer Array

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