2002
DOI: 10.1007/s11664-002-0103-x
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Under bump metallurgy study for Pb-free bumping

Abstract: The demand for Pb-free and high-density interconnection technology is rapidly growing. The electroplating-bumping method is a good approach to meet fine-pitch requirements, especially for high-volume production, because the volume change of patterned-solder bumps during reflow is not so large compared with the stencil-printing method. This paper proposes a Sn/3.5Ag Pb-free electroplating-bumping process for high-density Pb-free interconnects. It was found that a plated Sn/Ag bump becomes Sn/Ag/Cu by reflowing … Show more

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Cited by 11 publications
(5 citation statements)
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References 33 publications
(26 reference statements)
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“…Among many Pb-free solder alloys, SnAg, SnAgCu, and SnCu alloys are promising candidates for replacing the Sn37Pb alloy. [1][2][3]5 However, proper Pb-free solder alloys compatible with electroless Ni-P UBM have not been well understood yet. Especially, because of Cu addition in the solder alloy, a typical NiSn binary reaction could change into a Cu-Ni-Sn ternary reaction at Ni/Sn-based solder interfaces.…”
Section: Introductionmentioning
confidence: 99%
“…Among many Pb-free solder alloys, SnAg, SnAgCu, and SnCu alloys are promising candidates for replacing the Sn37Pb alloy. [1][2][3]5 However, proper Pb-free solder alloys compatible with electroless Ni-P UBM have not been well understood yet. Especially, because of Cu addition in the solder alloy, a typical NiSn binary reaction could change into a Cu-Ni-Sn ternary reaction at Ni/Sn-based solder interfaces.…”
Section: Introductionmentioning
confidence: 99%
“…Once the adhesion layer is consumed, the intermetallic compounds ͑IMCs͒ formed at the interface are spalled off from the nonwettable layer and the joint become fragile. [7][8][9][10][11][12][13][14] Eutectic SnAg (T eut ϭ221°C) and eutectic SnAgCu (T eut ϭ217°C) have been recommended by National Electronic Manufacturing Initiative as a replacement of the SnPb solders in the chip joint process for the manufacturing of low cost, large volume consumer products. 4,15 At higher reflow temperature, these solders can dissolve higher amounts of Cu than the eutectic SnPb.…”
Section: Introductionmentioning
confidence: 99%
“…[9][10][11] Among the deposition methods, electrolytic plating is highly recommended for a fine-pitch and lead-free solder because of the stability of the process, the feasibility of fine pitch, and the low cost. [12][13][14][15][16][17][18] Evaporation is too expensive, even though it can deposit very fine-pitch solder bumps. Stencil printing has a much lower cost, but it is highly doubtful for fine-pitch bumping.…”
Section: Introductionmentioning
confidence: 99%