The CuGaTe ternary compounds: Cu 3 Ga 5 Te 9 , Cu 2 Ga 4 Te 7 , CuGa 3 Te 5 , CuGa 5 Te 8 , and CuGaTe 2 have zinc-blende or chalcopyrite structure. The compounds except for CuGaTe 2 contain vacancies in the cation site due to the valence mismatch between cation and anion, and the vacancy concentration is different between these compounds. Here we investigated the effect of the amount of vacancies on the thermoelectric (TE) properties of the CuGaTe ternary compounds. At room temperature, the presence of vacancies reduced the Hall mobility (® H ) and the lattice thermal conductivity (¬ lat ), showing that the vacancies scattered both carriers and phonons. It was found that the decreasing rate of the ® H was larger than that of the ¬ lat . Therefore, the presence of vacancies degraded the TE performance of the CuGaTe ternary compounds. In other words, CuGaTe 2 without vacancies would show the best TE figure of merit. The room temperature ZT values for Cu 3 Ga 5 Te 9 , Cu 2 Ga 4 Te 7 , CuGa 3 Te 5 , CuGa 5 Te 8 , and CuGaTe 2 were 2.0 © 10 ¹2