Unfiltered Aluminium Vacuum Arc Plasma Application for High-Frequency Short-Pulse Plasma Immersion Ion Implantation

Abstract

This paper is devoted to the studying of the dynamical changes in the density of aluminium microparticles (MPs) on the substrate surface made of stainless steel, immersed in vacuum arc plasma, at high-frequency short-pulse negative bias potential. It is shown experimentally that the density of aluminium MPs on the substrate surface is decreased dynamically by 3 orders when the treatment time is increased from 15 s to 3 min at the bias potential –2 kV. A possibility of the application of MPs unfiltered vacuum arc plasma for high-frequency short-pulse plasma immersion ion implantation to form the intermetallic layers is discussed.

Low-pressure discharges with hollow cathode and hollow anode and their applications

“…The figure also demonstrates the principle of sustaining the discharge. It should be noted that there is great variety in the technical realizations of hollow-cathode discharge [18][19][20][21][22][23][24][25][26] that can superficially differ from the presented design. However, the general features of the discharge arrangement remain the same.…”

“…One of the discharge systems is intended for plasma generation in a large volume of the cathode cavity [18][19][20][21]. Such a discharge is often used for surface modification, when the samples are immersed in plasma [22][23][24][25][26][27].…”