Uniform and smooth molybdenum film produced through picosecond pulsed laser deposition

Abstract

An approach to achieve uniform and smooth molybdenum (Mo) film on a BK7 glass plate at room temperature is proposed through picosecond pulsed laser deposition, with the pulsed laser radiating the target along a linear track. A numerical model is established to analyze the influence of linear scanning offsets on the thickness homogeneity of the deposited thin film. Through an appropriate choice of radiation intensity and scanning parameters, a uniform and smooth layer of Mo thin film is prepared with its maximum thickness variation and root-mean-square roughness better than 5% and 1.2 nm, respectively.

Influence of double pulse ablation on the film topography in picosecond pulsed laser deposition of nickel

“…The schematic diagram of the ps-PLD experimental apparatus, which has been described previously in detail elsewhere, 14) is illustrated in Fig. 3.…”