Uniform patterned growth of carbon nanotubes without surface carbon

Teo, K. B. K.; Chhowalla, Manishkumar; Amaratunga, G. A. J.; Milne, W. I.; Hasko, D. G.; Pirio, G.; Legagneux, Pierre; Wyczisk, F.; Pribat, Didier

doi:10.1063/1.1400085

Cited by 330 publications

(197 citation statements)

References 14 publications

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“…Compared to other growth techniques, PECVD has become a very promising method because vertically aligned CNTs/CNFs can be grown at relatively low temperature. Moreover the radius and length of the CNTs/CNFs can be controlled over a wide range [6].…”

Section: Introductionmentioning

confidence: 99%

Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma-enhanced CVD system: the effect of processing parameters

Mao¹,

Bogaerts²

2010

J. Phys. D: Appl. Phys.

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To cite this version:M Mao, A Bogaerts. Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma-enhanced CVD system: the effect of processing parameters. Journal of Physics D: Applied Physics, IOP Publishing, 2010, 43 (31) Abstract.A parameter study is carried out for an inductively coupled plasma used for the synthesis of carbon nanotubes or carbon nanofibers (CNTs/CNFs), by means of the Hybrid Plasma Equipment Model (HPEM). The influence of processing parameters including gas ratio for four different gas mixtures typically used for CNT/CNF growth (i.e., CH 4 /H 2 , CH 4 /NH 3 , C 2 H 2 /H 2 and C 2 H 2 /NH 3 ), ICP power (50~1000W), operating pressure (10mTorr~1Torr), bias power (0~1000W) and temperature of the substrate (0~1000°C) on the plasma chemistry is investigated and the optimized conditions for CNT/CNF growth are analyzed. Summarized, our calculations suggest that a lower fraction of hydrocarbon gases (CH 4 or C 2 H 2 , i.e., below 20%) and hence a higher fraction of etchant gases (H 2 or NH 3 ) in the gas mixture result in more "clean" conditions for controlled CNT/CNF growth. The same applies to a higher ICP power, a moderate ICP gas pressure above 100 mTorr (at least for SWCNTs), a high bias power (for aligned CNTs), and an intermediate substrate temperature.

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Section: Introductionmentioning

confidence: 99%

Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma-enhanced CVD system: the effect of processing parameters

Mao¹,

Bogaerts²

2010

J. Phys. D: Appl. Phys.

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“…Annealing the as-deposited film causes dewetting (also referred to as agglomeration), by which a population of nanoparticles are created by atomic surface diffusion at high temperature. 19 Although other methods of preparing the catalyst nanoparticles such as by optical and electron beam lithography, 20 colloidal self-assembly, 21,22 and block copolymer self-assembly 23 have been used to successfully grow CNTs, thin film dewetting remains the most common, owing to its simplicity, ease of integration with CNT processing, and its scalability.…”

Section: Catalyst Preparation and Treatmentmentioning

confidence: 99%

Data-driven understanding of collective carbon nanotube growth by in situ characterization and nanoscale metrology

Bedewy

2016

J. Mater. Res.

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Aligned carbon nanotubes (CNTs) possess great potential for transforming the fabrication of advanced interfacial materials for energy and mass transport as well as for structural composites. Realizing this potential, however, requires building a deeper understanding and exercising greater control on the atomic scale physicochemical processes underlying the bottom-up synthesis and self-organization of CNTs. Hence, in situ nanoscale metrology and characterization techniques were developed for interrogating CNTs as they grow, interact, and self-assemble. This article presents an overview of recent research on characterization of CNT growth by chemical vapor deposition (CVD), organized into three categories based on the growth stage, for which each technique provides information: (I) catalyst preparation and treatment, (II) catalytic activation and CNT nucleation, and (III) CNT growth and termination. Combining all three categories together provides insights into building the process-structure relationship, and paves the way for producing tailored CNT structures having desired properties for target applications.

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“…Keeping the NH 3 flow rate fixed at 200sccm, the C 2 H 2 flow rate was varied in a series of depositions to determine the optimal conditions at which no a-C remains on the substrate. The thickness of surface a-C was determined using a combination of cross sectional SEM and depth resolved Auger Electron Spectroscopy [25] and the results are plotted in Figure 2. Deposition gas ratios of 15% and 20% C 2 H 2 :NH3 do not produce amorphous carbon on the substrate.…”

Section: (C) High Yield Of Nanotubes Is Observed When Ni Are Formed mentioning

confidence: 99%

Preferential Growth of Carbon Nanotubes/Nanofibers Using Lithographically Patterned Catalysts

et al. 2001

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In order to utilise the full potential of carbon nanotubes/nanofibers, it is necessary to be able to synthesize well aligned nanotubes/nanofibres at desired locations on a substrate. This paper examines the preferential growth of aligned carbon nanofibres by PECVD using lithographically patterned catalysts. In the PECVD deposition process, amorphous carbon is deposited together with the nanotubes due to the plasma decomposition of the carbon feed gas, in this case, acetylene. The challenge is to uniformly nucleate nanotubes and reduce the unwanted amorphous carbon on both the patterned and unpatterned areas. An etching gas (ammonia) is thus also incorporated into the PECVD process and by appropriately balancing the acetylene to ammonia ratio, conditions are obtained where no unwanted amorphous carbon is deposited. In this paper, we demonstrate high yield, uniform, 'clean' and preferential growth of vertically aligned nanotubes using PECVD.

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Uniform patterned growth of carbon nanotubes without surface carbon

Cited by 330 publications

References 14 publications

Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma-enhanced CVD system: the effect of processing parameters

Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma-enhanced CVD system: the effect of processing parameters

Data-driven understanding of collective carbon nanotube growth by in situ characterization and nanoscale metrology

Preferential Growth of Carbon Nanotubes/Nanofibers Using Lithographically Patterned Catalysts

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