2020
DOI: 10.1016/j.sse.2019.107685
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Uniformity investigation of pHEMTs in 3-D MMICs for pre and post multilayer fabrication

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Cited by 4 publications
(3 citation statements)
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“…Some changes in intrinsic values can be expected (due to process imperfections) but a substantial change in the extrinsic part www.advancedsciencenews.com www.pss-a.com can be seen due to the additional layers deposited on top towards MMIC environments. It has been reported in Alim et al [27] that multistacking does not influence the performance (which is less than 10%) that is implied to the intrinsic part of the devices. The relative sensitivities of the other parameters in Table 1 are calculated using Equation (1), in the same way as in the case of I ds and illustrated afterward in Figure 7-9.…”
Section: Sensitivity-based Analysismentioning
confidence: 81%
“…Some changes in intrinsic values can be expected (due to process imperfections) but a substantial change in the extrinsic part www.advancedsciencenews.com www.pss-a.com can be seen due to the additional layers deposited on top towards MMIC environments. It has been reported in Alim et al [27] that multistacking does not influence the performance (which is less than 10%) that is implied to the intrinsic part of the devices. The relative sensitivities of the other parameters in Table 1 are calculated using Equation (1), in the same way as in the case of I ds and illustrated afterward in Figure 7-9.…”
Section: Sensitivity-based Analysismentioning
confidence: 81%
“…Other DC figures of merit such as ideality factor ( n ), Schottky barrier height ( ϕ b ), knee voltage ( V knee ), on resistance ( R on ), and series resistance ( R series ) are summarized in Table 2. Detailed extraction procedure of the above‐mentioned parameters can be found in Reference 14.…”
Section: Results and Analysismentioning
confidence: 99%
“…The GaAs MMIC technology is very attractive for many high‐frequency applications as it allows achieving small size, light weight, high reliability, multifunctional capability, low cost, good reproducibility, and high‐volume production. An effective way of developing highly integrated MMICs is based on using the multilayer three‐dimensional (3‐D) technology 11‐15 . An improved version of the conventional AlGaAs/GaAs lattice‐matched HEMT is given by the AlGaAs/InGaAs/GaAs pseudomorphic HEM (pHEMT) 16,17 .…”
Section: Introductionmentioning
confidence: 99%