2017
DOI: 10.1016/j.apsusc.2016.09.149
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Universal dispersion model for characterization of optical thin films over wide spectral range: Application to magnesium fluoride

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Cited by 7 publications
(7 citation statements)
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“…were used in addition to the ellipsometric data (I s , I c , I n ) f measured from the side with the GdF 3 film (front side) and the data (I s , I c , I n ) b measured from the opposite side (back side). Although these data are not independent, the inclusion of difference ellipsometry in the data processing helps to reduce the influence of the substrate and systematic errors [2,5]. In the UV and VIS spectral range, where the silicon substrate is not transparent, the ellipsometry was also measured from the back side in order to determine the thickness of the native oxide layer.…”
Section: Experimental Arrangementmentioning
confidence: 99%
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“…were used in addition to the ellipsometric data (I s , I c , I n ) f measured from the side with the GdF 3 film (front side) and the data (I s , I c , I n ) b measured from the opposite side (back side). Although these data are not independent, the inclusion of difference ellipsometry in the data processing helps to reduce the influence of the substrate and systematic errors [2,5]. In the UV and VIS spectral range, where the silicon substrate is not transparent, the ellipsometry was also measured from the back side in order to determine the thickness of the native oxide layer.…”
Section: Experimental Arrangementmentioning
confidence: 99%
“…According to our experience, similar to difference ellipsometry, the relative reflectance helps to reduce the correlations between the sought parameters by compensating for systematic errors in measurement [2,5].…”
Section: Experimental Arrangementmentioning
confidence: 99%
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“…Nevertheless, it should be noted that in principle it is possible to separate the interband transitions into the valence to conduction band transitions and into the high energy excitations of valence electrons since each of them has different dependence on temperature. This separation is convenient if the experimental data extending to the synchrotron spectral region are processed [31][32][33].…”
Section: N T E R B a N D T R A N S I T I O N S I N D I S O R D E Rementioning
confidence: 99%
“…The dielectric functions of materials (Si, SiO 2 , doped Si), necessary for these calculations, were acquired from past work , (represented as ε lit in Figure ). However, the published optical data on MgF 2 , and Al 2 O 3 ,, films vary widely due to different deposition conditions and sample preparation. Therefore, we directly measured the optical constants for MgF 2 and Al 2 O 3 for free-space wavelengths 1.7–33 μm with a spectroscopic ellipsometer (see Supporting Information).…”
mentioning
confidence: 99%