Universal Mathematical Model of De-Gassing Process by Molecular Vacuum Pump

Demikhov, K. E.; Ochkov, A.A.

doi:10.18698/0236-3941-2017-6-134-143

HoBMSTU.SME

2017

DOI: 10.18698/0236-3941-2017-6-134-143

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Universal Mathematical Model of De-Gassing Process by Molecular Vacuum Pump

K. E. Demikhov¹,

A.A. Ochkov²

Abstract: For the first time, the universal mathematical model describing the working process of de-gassing by a molecular vacuum pump has been developed in a wide range of pumping parameters under different gas flow regimes, which allows calculating the channel parameters of disk and cylindrical molecular vacuum pumps. The adequacy of developed mathematical model is verified by comparison with the experimental data -the maximum calculating error doesn't exceed 20% Mathematical model, vacuum pump, molecular vacuum pump… Show more

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Algorithm for Determining Optimum Runner Number in the Blading Section of a Turbomolecular Pump

2020

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The paper considers developing an algorithm for determining the optimum runner number in the blading section of a turbomolecular pump. Such pumps are built into chromatograph mass spectrometers for ensuring vacuum production in the chamber. Turbo-molecular pumps boast a number of advantages over other pumping solutions since it is possible to arrive at the required pumping parameters by means of selecting the optimum blading section configuration. In order to solve this problem, we present an algorithm for calculating the optimum runner number in the blading section of a turbomolecular pump, ensuring the pumping characteristics required: pumping speed and pressure ratio. The algorithm is based on well-known analytical expressions describing processes taking place in pumps of this type, which means it is highly computationally efficient. We determined the respective blading section parameter values, selected the values of empirical coefficients and plotted the pumping performance for the first two runners. The algorithm developed may be used to optimise mass and dimensions of turbomolecular pumps, which could significantly expand their use.

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Algorithm for Determining Optimum Runner Number in the Blading Section of a Turbomolecular Pump

2020

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Prospects for Developing Modern High-Vacuum Mechanical Pumps

Ochkov

2022

HoBMSTU.SME

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High-vacuum mechanical pumps are widely used in various fields of science and technology for research and industrial applications. Modern high-vacuum mechanical pumps include molecular vacuum pumps, turbomolecular vacuum pumps and hybrid turbomolecular vacuum pumps, i.e., designs that represent a turbomolecular vacuum pump with one or more additional molecular stages. There are also a number of experimental and theoretical developments that propose combinations of different types of high-vacuum pumps in which, as a rule, on the suction side the main pumping is carried out by an axial turbomolecular stage. These schemes belong to the class of modern high-vacuum mechanical pumps. The paper examines the designs and analyzes scientific studies of modern high-vacuum mechanical pumps. Relying on this overview, we found the unsolved problems of designing and mathematical modeling of high-vacuum mechanical pumps working processes, which could give further prospects for vacuum technology development

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Universal Mathematical Model of De-Gassing Process by Molecular Vacuum Pump

Cited by 2 publications

References 2 publications

Algorithm for Determining Optimum Runner Number in the Blading Section of a Turbomolecular Pump

Algorithm for Determining Optimum Runner Number in the Blading Section of a Turbomolecular Pump

Prospects for Developing Modern High-Vacuum Mechanical Pumps

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