Water ice clouds can form in the coldest regions of rarefied planetary upper atmospheres, where particles grow through deposition from the vapor phase. Despite the very low partial pressures of water in the upper atmospheres of Venus, Earth, and Mars, the temperatures can be low enough (∼<150 K, depending on the planet) to lead to large supersaturations and the formation of ice particles. At these temperatures multiple metastable forms of ice can exist, but the phases that can form remain poorly defined. In this study, we focus on understanding the phase of ice that forms in this class of very cold clouds which exist in the upper atmospheres of three of the terrestrial planets in the solar system. In Earth's upper mesosphere (80-90 km), nanoparticles composed primarily of water ice form between 100 and 150 K, producing clouds known as Polar Mesospheric Clouds (PMCs) or noctilucent clouds (NLCs) (Hervig et al., 2001; Rapp & Thomas, 2006; Thomas, 1991). In the Martian atmosphere, water ice clouds have also been observed planet wide at altitudes up to 90 km where temperatures can drop to <120 K (Fedorova et al., 2020; Forget et al., 2009; Vincendon et al., 2011). In addition, water ice particles may serve as seeds for CO 2 ice particles in the Martian mesosphere (Plane et al., 2018). On Venus, the possibility of water Abstract Water ice clouds form in the mesospheres of terrestrial planets in the solar system (and most likely elsewhere) by vapor deposition at low pressures and temperatures. Under these conditions a range of crystalline and amorphous phases of ice might form. The phase is important because it influences nucleation kinetics, density, vapor pressure over the solid, growth rates and particle shape. In the past, the temperature range over which these different phases exist has been defined on the basis of depositing ice at low temperature and warming it while observing phase changes. However, the direct deposition of ice at a range of temperatures relevant for the terrestrial planets has not been systematically investigated. Here we present X-ray Diffraction (XRD) measurements of water ice deposited at temperature intervals between 88 and 145 K in a vacuum chamber. XRD patterns showed that low density amorphous ice was formed at ≤120 K, stacking disordered ice I formed from 121 to 135 K and hexagonal ice I formed at 140 and 145 K. Direct deposition results in the stable hexagonal phase at much lower temperatures than when warming stacking disordered ice. All three phases of water ice observed here are possible in clouds in the mesospheres of Earth and Mars, while on Venus only amorphous ice is likely to form. Plain Language Summary Ice clouds made up of water ice crystals can form in the thin upper atmospheres (mesospheres) of terrestrial planets where it can be extremely cold. Under these conditions a range of crystalline (hexagonal, cubic, or stacking disordered) and amorphous (lacking long range order) phases of ice might form. The phase is important because it influences a range of cloud properties. ...