Unveiling the mechanism of remote epitaxy of crystalline semiconductors on 2D materials-coated substrates

Abstract

Remote epitaxy has opened novel opportunities for advanced manufacturing and heterogeneous integration of two-dimensional (2D) materials and conventional (3D) materials. The lattice transparency as the fundamental principle of remote epitaxy has been studied and challenged by recent observations defying the concept. Understanding remote epitaxy requires an integrated approach of theoretical modeling and experimental validation at multi-scales because the phenomenon includes remote interactions of atoms across an atomically thin material and a few van der Waals gaps. The roles of atomically thin 2D material for the nucleation and growth of a 3D material have not been integrated into a framework of remote epitaxy research. Here, we summarize studies of remote epitaxy mechanisms with a comparison to other epitaxy techniques. In the end, we suggest the crucial topics of remote epitaxy research for basic science and applications. Graphical Abstract

https://2DMat.ChemDX.org: Experimental data platform for 2D materials from synthesis to physical properties

“…74–80 Using the RHEED dataset, we will conduct a more quantitative analysis of the growth modes of 2D materials over time and identify crystal structures during the film growth. 81–84 Along with the in situ RHEED data, we collected diverse surface analysis results for targeted samples, including AFM images, XPS, and PL/Raman spectra.…”