“…Especially, in order to use the advantages of the FIB, in terms of the high lateral resolution, the flexibility in fluence and pattern design for direct doping purposes, one needs different ion sources to produce the wealth of technologically interesting ions. As an example B + , As + or P + for Si-doping [11] or rare earth elements like Er + , Pr + and Nd + for opto-electronic applications [12] metals, like Au + for plasmonic structures [13] or Fe + , Co + and Ni + for selective changes of magnetic properties [14] should be mentioned. To operate LMISs with such source materials is in most cases difficult, due to the high melting points of the pure materials.…”