Upgrade of beamline BL08B at Taiwan Light Source from a photon-BPM to a double-grating SGM beamline

Abstract

During the last 20 years, beamline BL08B has been upgraded step by step from a photon beam-position monitor (BPM) to a testing beamline and a single-grating beamline that enables experiments to record X-ray photo-emission spectra (XPS) and X-ray absorption spectra (XAS) for research in solar physics, organic semiconductor materials and spinel oxides, with soft X-ray photon energies in the range 300-1000 eV. Demands for photon energy to extend to the extreme ultraviolet region for applications in nano-fabrication and topological thin films are increasing. The basic spherical-grating monochromator beamline was again upgraded by adding a second grating that delivers photons of energy from 80 to 420 eV. Four end-stations were designed for experiments with XPS, XAS, interstellar photoprocess systems (IPS) and extreme-ultraviolet lithography (EUVL) in the scheduled beam time. The data from these experiments show a large count rate in core levels probed and excellent statistics on background normalization in the L-edge adsorption spectrum.

Calibration of a compact XUV soft X-ray monochromator with a digital autocollimatorin situ

“…5( f ) were fitted with seven vibrational states of a Voigt line-shape function after subtracting a linear background. The fitted results of the FWHM for the Lorentzian and Gaussian shapes of the first line (least photon energy) are 127.6 and 38 meV; for analysis details see Yuh et al (2015) and Prince et al (1999). Fig.…”

“…Beamline BL08B at the Taiwan Light Source serves multiple purposes (Yuh et al, 2015); the cylidrical-grating monochromator (CGM)-type beamline is one of the mainstream designs in the booming era of synchrotron development (Chen, 1987). The optics layout of the beamline is shown in Fig.…”

“…The monochromator system consists of two exchangeable gratings and a movable exit slit (travel range AE 35 cm) to optimize the monochromatic photon energy at variable positions due to the off-Rowland-circle condition. The final beam spot is refocused at a beam quality diagnostic endstation; for details of the beamline design and gas-phase measuring system refer to Yuh et al (2015). Fig.…”