The effect of electron doping by trivalent charge state rare-earth-ion (RE = La, Ce, Pr and Nd) substitutions on the superconductivity in BaFe 2 As 2 was examined using epitaxial films. Each of the RE substitutions suppressed the resistivity anomaly associated with magnetic/structural phase transitions, leading to resistivity drops and superconductivity transitions. Bulk superconductivity was observed at the maximum onset critical temperature (T onset c ) of 22.4 K for La doping and 13.4 K for Ce doping, while only broad resistivity drops were observed at 6.2 K for Pr doping and 5.8 K for Nd doping although zero resistivity and the distinct Meissner effect were not observed at least down to 2 K. The decrease in T onset c with increasing the number of RE 4f electrons cannot be explained in terms of the crystalline quality or crystallographic structure parameters of BaFe 2 As 2 films. It was clarified, based on resistivity-temperature analyses, that magnetic scattering became increasingly significant in the above