2015 Ieee Sensors 2015
DOI: 10.1109/icsens.2015.7370350
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Upside-down Carbon nanotube (CNT) micro-electrode array (MEA)

Abstract: A novel fabrication process for CNT micro-electrode arrays (MEA) integrated on stretchable Polydimethylsiloxane (PDMS) membranes is presented. The new process flow overcomes the problems encountered in previous reports. In the process flow presented in this paper, Carbon nanotubes (CNT) electrodes are embedded on the backside of a freestanding membrane using a novel fabrication technique. This upsidedown CNT MEA consists of micro-electrodes with an area of 110 µm 2 covered with Cobalt-grown CNTs. The recorded … Show more

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Cited by 5 publications
(6 citation statements)
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“…The cells cultured in the OOC can be also monitored via the Pt electrodes directly embedded in the PDMS membrane. In order to fabricate this device, the wafer-scale microfabrication process previously presented by Pakazad et al [25], [27] was modified and optimized. Second, the PEDOT:PSS is deposited directly on top of the Pt electrodes by electrochemical polymerization.…”
Section: Device Fabricationmentioning
confidence: 99%
See 2 more Smart Citations
“…The cells cultured in the OOC can be also monitored via the Pt electrodes directly embedded in the PDMS membrane. In order to fabricate this device, the wafer-scale microfabrication process previously presented by Pakazad et al [25], [27] was modified and optimized. Second, the PEDOT:PSS is deposited directly on top of the Pt electrodes by electrochemical polymerization.…”
Section: Device Fabricationmentioning
confidence: 99%
“…The cyclic voltammetry (CV) deposition method with a three electrodes cell setup [27], was utilized in order to increase the deposition rate by exploiting the capacitive current. In this procedure, the voltage on the working electrode is scanned over a 0.2 -1.3 V (vs. Ag/AgCl) range with a scan rate of 0.5 V/s.…”
Section: B Pedot Electrochemical Depositionmentioning
confidence: 99%
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“…The signal has a relatively low signal-to-noise ratio (SNR) compared to other works [ 26 , 27 ], due to the high electrochemical impedance of the flat and subcellular electrodes included in the Cytostretch device [ 12 , 25 ]. The impedance can be improved by coating the electrodes with porous coating such as carbon nanotubes as shown by the author in [ 28 ].…”
Section: Micro-electrode Arraymentioning
confidence: 99%
“…Micro-electrodes and micro-electrode arrays (MEAs) are very important in a variety of medical applications like cochlear implants, retinal implants or deep brain stimulators. There, micro-electrodes are used for recording action potentials or stimulating neurons [1]. Especially for retinal implants it is necessary that these MEAs are flexible to conform to the curvature of the eye.…”
Section: Introductionmentioning
confidence: 99%