Usage induced changes to surface topography and material properties in polysilicon MEMS electrothermal structures

Dr. Dallas' research includes MEMS packaging issues with an emphasis on stiction. In addition, his research group designs and tests SUMMiT processed dynamic MEMS devices. His MEMS group has strong education and outreach efforts in MEMS and has developed a MEMS chip for educational labs. His group uses commercial MEMS sensors for a project aimed at preventing falls by geriatric patients. Dr. Dallas received the B.A. degree in Physics from the University of Chicago and an MS and PhD from Texas Tech University in Physics. He worked as a Technology and Applications Engineer for ISI Lithography and was a post-doctoral research fellow in Chemical Engineering at the University of Texas, prior to his faculty appointment at TTU.

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MEMS-based Educational Laboratory

Dallas¹

2014 ASEE Annual Conference &Amp; Exposition Proceedings

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Usage induced changes to surface topography and material properties in polysilicon MEMS electrothermal structures

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MEMS-based Educational Laboratory

MEMS-based Educational Laboratory

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