Use of 3D metrology for process control

Rijpers, Bart; Finders, Jo; Suzuki, Hisao; Fujii, Toshiaki; Yamazaki, Yuichiro; Abe, Hikaru; Pérez‐Willard, F.

doi:10.1117/12.816370

Cited by 1 publication

(1 citation statement)

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“…For the increasingly complex optimization of the semiconductor manufacturing processes it is necessary not only to determine a single parameter, such as a linewidth, but additional information such as edge angles, line edge roughness and other topography details [79,80]. For example, the ITRS roadmap [77] requires for the 32 nm half pitch node in 2011 a CD metrology tool uncertainty for isolated lines of 0.48 nm (for EUV reflection lithography) and of 0.30 nm (for 193 nm transmission lithography double patterning).…”

Section: Electrical Nanometrologymentioning

confidence: 99%

The European nanometrology landscape

Leach¹,

Boyd²,

Burke³

et al. 2011

Nanotechnology

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This review paper summarizes the European nanometrology landscape from a technical perspective. Dimensional and chemical nanometrology are discussed first as they underpin many of the developments in other areas of nanometrology. Applications for the measurement of thin film parameters are followed by two of the most widely relevant families of functional properties: measurement of mechanical and electrical properties at the nanoscale. Nanostructured materials and surfaces, which are seen as key materials areas having specific metrology challenges, are covered next. The final section describes biological nanometrology, which is perhaps the most interdisciplinary applications area, and presents unique challenges. Within each area, a review is provided of current status, the capabilities and limitations of current techniques and instruments, and future directions being driven by emerging industrial measurement requirements. Issues of traceability, standardization, national and international programmes, regulation and skills development will be discussed in a future paper.

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Section: Electrical Nanometrologymentioning

confidence: 99%