2007
DOI: 10.1002/app.25471
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Use of different size grids to control the surface chemistry of plasma‐polymerized acrylic acid films in a hybrid discharge

Abstract: The surface chemistry of plasma-polymerized acrylic acid (ppAc) films were controlled in a twostage (primary and processing) hybrid radio frequency (RF) discharge by changing the grid wire spacing (d s ). Two regions were defined in terms of d s with respect to Debye length (l d ) in the primary chamber at the grid to control the electron temperature (T e ) and surface chemistry of the ppAc films deposited in the processing chamber. A higher T e (>3 eV) in the processing plasma was possible for d s > l d , whe… Show more

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“…This retention behavior is explained by the surface grafting and the chain growth which are primarily occurring during the duty off phase [16]. This is associated with a cold but still relatively dense plasma compared to that one during the ignition phase, with very low ion energy and flux [17][18][19].…”
Section: Introductionmentioning
confidence: 99%
“…This retention behavior is explained by the surface grafting and the chain growth which are primarily occurring during the duty off phase [16]. This is associated with a cold but still relatively dense plasma compared to that one during the ignition phase, with very low ion energy and flux [17][18][19].…”
Section: Introductionmentioning
confidence: 99%