Journal of Electron Spectroscopy and Related Phenomena
 2019
DOI: 10.1016/j.elspec.2019.04.004
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Use of Si KLL Auger shifts and the Auger parameter in XPS to distinguish Ti silicides from a Ti/Si mixture in thin films

Ghazal Saheli
1
,
Takashi Kuratomi
2
,
I-cheng Chen
3
et al.
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