1999
DOI: 10.1016/s0257-8972(98)00727-0
|View full text |Cite
|
Sign up to set email alerts
|

Use of the magnetron-sputtering technique for the control of the properties of indium tin oxide thin films

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
18
0

Year Published

2004
2004
2022
2022

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 64 publications
(18 citation statements)
references
References 29 publications
0
18
0
Order By: Relevance
“…With fixed other process parameters, a higher deposition power would provide a higher deposition rate. Films deposited at higher deposition rates is expected to have larger crystalline grains, which would lead to higher charge carrier mobility and thus lower resistivity 17 .…”
Section: Resultsmentioning
confidence: 99%
“…With fixed other process parameters, a higher deposition power would provide a higher deposition rate. Films deposited at higher deposition rates is expected to have larger crystalline grains, which would lead to higher charge carrier mobility and thus lower resistivity 17 .…”
Section: Resultsmentioning
confidence: 99%
“…Carrier concentration was measured using Hall effect. The Hall coefficient (R H ) was determined using the formula [30]:…”
Section: Electrical Propertiesmentioning
confidence: 99%
“…TiO 2 can be used as solar cell applications (DSSC) [10] electrochemical cells (PEC) [11] chemical sensors [12] and self-cleaning coatings [13]. Thin films of TiO2 are deposited by various methods including electron beam [14,15] magnetron sputtering technique [16], plasma evaporation [17], pulsed laser deposition [18], self-assembly process [19], laser chemical vapor depositing [20,21] and sol-gel method [22]. BaAbbad et al (2012) synthesized the TiO2 nanoparticles catalyst by sol-gel method using the titanium tetraisopropoxide as starting material.…”
Section: Introductionmentioning
confidence: 99%