Abstract:We fabricate and characterize a microscale silicon opto-electromechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental Ï m /2Ï = 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion. References and links 1. N. Yazdi, F. Avazi, and K. Najafi, "Micromachined inertial sensors," Proc. IEEE 86, 1640IEEE 86, -1659IEEE 86, (1998. 2. T. Tajima, T. Nishiguchi, S. Chiba, A. Morita, M. Abe, K. Tanioka, N. Saito, and M. Esashi, "High-performance ultra-small single crystalline silicon microphone of an integrated structure," Microelectron. Eng. 67-68, 508-519 (2003).