Using ElectroMechanical Buckling for Measuring Residual Stress

Abu-Salih, Samy; Elata, David

doi:10.1109/esime.2006.1643991

Cited by 3 publications

(4 citation statements)

References 12 publications

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“…This means that for small deflections the stiffness of the system vanishes, and this is a bifurcation transition of the equilibrium state [10]. This bifurcation transition is related to the phenomenon of electromechanical buckling [11].…”

Section: Side Pull-in Of Individual Comb Fingersmentioning

confidence: 99%

How slender can comb-drive fingers be?

Elata¹,

Leus²

2005

J. Micromech. Microeng.

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In this work, the electromechanical stability of individual comb-drive fingers is considered. Previous studies have shown that optimal design of elastic suspensions can prevent the side pull-in instability of comb-drive rotors. In this work it is shown that side pull-in can nevertheless occur in individual comb fingers, if they are exceedingly slender. To this end, the critical electromechanical state of individual comb fingers is analytically solved. This solution is in good agreement with finite elements simulations. The analytic solution can be used to design comb-drives in which side pull-in of individual fingers is avoided.

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Section: Side Pull-in Of Individual Comb Fingersmentioning

confidence: 99%

How slender can comb-drive fingers be?

Elata¹,

Leus²

2005

J. Micromech. Microeng.

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“…The electromechanical system is governed by the following nonlinear integral-differential equation [7], [9]:…”

Section: Equation Of Motionmentioning

confidence: 99%

“…An analytical approach and a reduced-order model to investigate the behavior of electrically actuated microbeam-based MEMS are presented in [5] by Younis et al Nayfeh et al [6] studied the pull-in instability in MEMS resonators and established that characteristics of the pull-in phenomenon in the presence of alternate current (AC) loads differ from those under purely direct current (DC) loads. A new test structure and method for measuring residual stresses was presented by Abu-Salih and Elata [7]. They showed that a single test structure of the proposed design may be used to measure compressive and tensile residual stress in a continuous wide range.…”

Section: Introductionmentioning

confidence: 99%

“…The analytical approximate solutions are obtained through a version of OHAM applied to a nonlinear integral-differential equation established in [7] and [9]. Our procedure, which is independent of the presence of small or large parameters, is based on the construction and determination of the linear operator and of the auxiliary functions, combined with a convenient way to optimally control the convergence of the solution.…”

Section: Introductionmentioning

confidence: 99%

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Optimal homotopy asymptotic method to large post-buckling deformation of MEMS

Herişanu

Marinca

2018

MATEC Web Conf.

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Abstract. In the present paper, the post-buckling response of an axially stressed clampedclamped actuator, modeled as a beam and subjected to a symmetric electrostatic field is analyzed. An analytical approximate method, namely the Optimal Homotopy Asymptotic Method (OHAM) is applied to the governing nonlinear integro-differential equation. The analytical results obtained through the proposed procedure show excellent agreement with numerical solution, proving the validity of the proposed procedure, which is simple and easy to use.

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