Abstract:Carbon infiltrated carbon nanotubes (CI-CNT) are an important emerging material in several micro-electro-mechanical systems (MEMS) because of their unique mechanical and chemical properties. While CI-CNTs are only roughly conductive they work well in micro springs, levers, and meshes. However, fabrication of CI-CNTs can result in large mechanical property variation, and methods to characterize properties usually involve destructive testing. Destructive testing also assumes the tested specimens are representati… Show more
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