Utilization of mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long term in-run bias stability

Zotov, Sergei A.; Simon, Brenton R.; Sharma, Garima; Trusov, Alexander A.; Shkel, Andrei M.

doi:10.1109/isiss.2014.6782536

Cited by 32 publications

(14 citation statements)

References 5 publications

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“…As can be seen from Equations (18) and (19), the rotor temperature response changing from an initial state to its equilibrium is in an exponential decay process with a time constant τ = 711.5 s, when the silicon emissivity is ε 1 = 0.05 and T a is 300 K. Here δ = 5.67 × 10 −8 W/(m 2 •K 4 ) is the blackbody radiation constant coefficient. The thermal equilibrium time of the suspended rotor is calculated as 3τ = 35.6 min, which roughly governs the temperature stabilization process of the MESG device.…”

Section: Radiative Thermal Transfer Model Of the Mesgmentioning

confidence: 99%

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Analysis and Compensation of Bias Drift for a Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

Wang

Han

2020

Sensors

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Bias stability is one of primary characteristics of precise gyroscopes for inertial navigation. Analysis of various sources of the bias drift in a micromachined electrostatically suspended gyroscope (MESG) indicates that the bias stability is dominated by the temperature-induced drift. The analytical results of temperature drift resulting from the rotor structure and capacitive position sensing electronics are modeled and analyzed to characterize the drift mechanism of the MESG. The experimental results indicate that the bias drift is mainly composed of two components, i.e., rapidly changing temperature drift and slowly changing time drift. Both the short-term and long-term bias drift of the MESG are tested and discussed to achieve online bias compensation. Finally, a neural network based-bias compensation scheme is presented and verified experimentally with improved bias stability of the MESG.

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Section: Radiative Thermal Transfer Model Of the Mesgmentioning

confidence: 99%

“…The bias stability of gyroscopes is the most crucial performance gauge for inertial navigation applications [18]. Ambient temperature variation inevitably results in bias drift and performance degradation [19,20].…”

Section: Introductionmentioning

confidence: 99%

Analysis and Compensation of Bias Drift for a Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

Wang

Han

2020

Sensors

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“…A half-month long in-run experiment was performed to assess the long term stability of the standalone gyro system, Figure 6. Self-calibration using the PLL and quadrature feedback loop command signals was employed [8,9]. The data demonstrates excellent stability of 0.2 deg/hr for integration times spanning from several minutes to several weeks (limited by the duration of the conducted experiment) with no discernible upward trend in the Allan deviation curve.…”

Section: Force Rebalance Rate Modementioning

confidence: 99%

Non-Axisymmetric Coriolis Vibratory Gyroscope With Whole Angle, Force Rebalance,

Trusov¹,

Rozelle²,

Atikyan³

et al. 2014

2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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This paper presents detailed performance status and projections for the silicon MEMS Quadruple Mass Gyroscope (QMG) -a unique high Q, lumped mass, mode-symmetric Class II Coriolis Vibratory Gyroscope (CVG) with interchangeable whole angle, self-calibration, and force rebalance mechanizations. Analysis of a QMG sealed without getter with a Q-factor of 1e3 reveals an Angle Random Walk (ARW) of 0.02 deg/rt-hr limited only by the fundamental Mechanical-Thermal Noise (MTN). Propagation of a detailed noise model to a QMG sealed with getter at a Q-factor of 1e6 (previously demonstrated) showed better than Navigation Grade ARW of 0.001 deg/rt-hr. Combination of the very low ARW with the mode-symmetry enabled self-calibration substantiates the navigation grade performance capacity of the Si-MEMS QMG.

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“…The QMG device described herein has evolved considerably from the first introduction of the concept in [ 18 ], in terms of its structure and control architecture, demonstrating an excellent modal symmetry and exceptional Q-factor. Features of the design discussed here are categorized into three design iterations: (QMG-I) with mass symmetry and an external lever mechanism [ 18 , 26 ], (QMG-II) with mode-ordering, as well as an internal and external levering, comb-finger drive electrodes and parallel-plate sense electrodes [ 27 , 28 ], and, (QMG-III) with a complete symmetry of the design, including internal and external levering, with differential parallel-plate drive and sense electrodes [ 29 , 30 ], and vacuum sealing with getters. Table 1 summarizes the key parameters of these iterations, the performance numbers and the corresponding publications, a visual comparison of the layouts is provided in [ 31 ] Section 3.2.4.…”

Section: Introductionmentioning

confidence: 99%

Performance of Quad Mass Gyroscope in the Angular Rate Mode

2021

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In this paper, the characterization and analysis of a silicon micromachined Quad Mass Gyroscope (QMG) in the rate mode of operation are presented. We report on trade-offs between full-scale, linearity, and noise characteristics of QMGs with different Q-factors. Allan Deviation (ADEV) and Power Spectral Density (PSD) analysis methods were used to evaluate the performance results. The devices in this study were instrumented for the rate mode of operation, with the Open-Loop (OL) and Force-to-Rebalance (FRB) configurations of the sense mode. For each method of instrumentation, we presented constraints on selection of control parameters with respect to the Q-factor of the devices. For the high Q-factor device of over 2 million, and uncompensated frequency asymmetry of 60 mHz, we demonstrated bias instability of 0.095∘/hr and Angle Random Walk (ARW) of 0.0107∘/√hr in the OL mode of operation and bias instability of 0.065∘/hr and ARW of 0.0058∘/√hr in the FRB mode of operation. We concluded that in a realistic MEMS gyroscope with imperfections (nearly matched, but non-zero frequency asymmetry), a higher Q-factor would increase the frequency stability of the drive axis resulting in an improved noise performance, but has challenges in implementation of digital control loops.

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Utilization of mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long term in-run bias stability

Cited by 32 publications

References 5 publications

Analysis and Compensation of Bias Drift for a Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

Analysis and Compensation of Bias Drift for a Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

Non-Axisymmetric Coriolis Vibratory Gyroscope With Whole Angle, Force Rebalance,

Performance of Quad Mass Gyroscope in the Angular Rate Mode

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