“…The UV laser polymerization from acetylene and ammonia mixtures can produce carbon nitride thin films with high hardness, chemical, and thermal stability (Liu and Cohen, 1990;Crunteanu et al, 2000). Besides, polyacetylenes or substituted polyacetylenes have been shown to be humidity sensitive materials (Li and Yang, 2002a, b;Bearzotti et al, 2001), but few reports have been found for applying plasmapolymerized films from acetylene and/or mixtures to humidity or other chemical sensors.…”