UV sensing using film bulk acoustic resonators based on Au/n-ZnO/piezoelectric-ZnO/Al structure

Bian, Xiaolei; Jin, Hao; Wang, Xiaozhi; Dong, Shurong; Chen, Guohao; Luo, Jikui; Deen, M. Jamal; Qi, Bensheng

doi:10.1038/srep09123

Cited by 41 publications

(16 citation statements)

References 26 publications

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“…ZnO has caught attention because of its wide variety of structures or morphologies such as nanowires, , nanobelts, nanorings, , nanoparticles, and tetrapods , and may be the richest family among all materials in both structures and properties. For the past decade, nanoengineering of ZnO by controlling its size and morphology using various synthesis methods has been performed, and a great variety of nanostructured ZnO morphologies have been accomplished. ,, The morphological diversity of nanostructured ZnO leads to some interesting properties including surface-related and optoelectrical properties. − Thus, controlling the growth kinetics of the synthesis process via nanoengineering is an important issue for utilizing ZnO nanostructures. ,, …”

Section: Introductionmentioning

confidence: 99%

Realization of Interlinked ZnO Tetrapod Networks for UV Sensor and Room-Temperature Gas Sensor

Thepnurat¹,

Chairuangsri²,

Hongsith

et al. 2015

ACS Appl. Mater. Interfaces

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Here, interlinked ZnO tetrapod networks (ITN-ZnO) have been realized by using microwave-assisted thermal oxidation. With this simple and fast process, a nanostructured ZnO morphology having tetrapodlike features with leg-to-leg linking is obtained. The electrical and ethanol-sensing properties related to the morphology of ITN-ZnO compared with those of other ZnO morphologies have also been investigated. It has been found that ITN-ZnO unexpectedly exhibits superior electrical and gas-sensing properties in terms of providing pathways for electron transport to the electrode. A UV sensor and a room-temperature gas sensor with improved performance are achieved. Therefore, ITN-ZnO is an attractive morphology of ZnO that is applicable for many new applications because of its novel properties. The novel properties of ITN-ZnO are beneficial for electronic, photonic, optoelectronic, and sensing applications. ITN-ZnO may provide a means to improve the devices based on ITN-ZnO.

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Section: Introductionmentioning

confidence: 99%

Realization of Interlinked ZnO Tetrapod Networks for UV Sensor and Room-Temperature Gas Sensor

Thepnurat¹,

Chairuangsri²,

Hongsith

et al. 2015

ACS Appl. Mater. Interfaces

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“…These captured oxygen molecules will deprive free electrons of the surface-sensitive layer and become oxygen ions, thus forming a depletion region. The relevant chemical reactions are listed in the following equations 40 . …”

Section: Resultsmentioning

confidence: 99%

A new strategy to minimize humidity influences on acoustic wave ultraviolet sensors using ZnO nanowires wrapped with hydrophobic silica nanoparticles

Guo

Zhou

et al. 2022

Microsyst Nanoeng

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Surface acoustic wave (SAW) technology has been widely developed for ultraviolet (UV) detection due to its advantages of miniaturization, portability, potential to be integrated with microelectronics, and passive/wireless capabilities. To enhance UV sensitivity, nanowires (NWs), such as ZnO, are often applied to enhance SAW-based UV detection due to their highly porous and interconnected 3D network structures and good UV sensitivity. However, ZnO NWs are normally hydrophilic, and thus, changes in environmental parameters such as humidity will significantly influence the detection precision and sensitivity of SAW-based UV sensors. To solve this issue, in this work, we proposed a new strategy using ZnO NWs wrapped with hydrophobic silica nanoparticles as the effective sensing layer. Analysis of the distribution and chemical bonds of these hydrophobic silica nanoparticles showed that numerous C-F bonds (which are hydrophobic) were found on the surface of the sensitive layer, which effectively blocked the adsorption of water molecules onto the ZnO NWs. This new sensing layer design minimizes the influence of humidity on the ZnO NW-based UV sensor within the relative humidity range of 10–70%. The sensor showed a UV sensitivity of 9.53 ppm (mW/cm2)−1, with high linearity (R2 value of 0.99904), small hysteresis (<1.65%) and good repeatability. This work solves the long-term dilemma of ZnO NW-based sensors, which are often sensitive to humidity changes.

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“…The wavelength of the flexible SAW sensor is 100 μm, and the vibration mode is A 0 . When the device is exposed to UV light, the resonant frequency of the flexible SAW sensor is decreased as a result of the generation of excess carriers in ZnO, thus resulting in increased capacitance . This effect is reversible, with the resonant frequency recovering to its original value when UV excitation is switched off.…”

Section: Resultsmentioning

confidence: 99%

Three-Dimensional Tetrapodal ZnO Microstructured Network Based Flexible Surface Acoustic Wave Device for Ultraviolet and Respiration Monitoring Applications

Zhang

Jin

Mintken

et al. 2020

ACS Appl. Nano Mater.

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Sensitivity of flexible surface acoustic wave (SAW) sensors to ultraviolet (UV) light is enhanced by application of micro-and nano-structured ZnO networks as sensing layers. In this study, the influence of three dimensional (3D) tetrapodal ZnO microstructured networks spin coated onto Al foil/ZnO piezoelectric film SAW devices on the sensor performance under stimulus of UV light irradiation and influencs of relative humidity was investigated. The UV light sensitivity is increased from -3.03×10 −6 cm 2 mW -1 to -5.25×10 −6 cm 2 mW -1 with the application of 3D tetrapodal ZnO microstructured networks. Likewise, the humidity sensitivity is enhanced by a factor of 2.9 at 90% relative humidity, which is explained by the porous structure of tetrapodal ZnO microstructured networks. In addition, the measured sensitivity to UV light intensity is demonstrated to be significantly modified under a bent condition, because the surface of ZnO piezoelectric film is relatively denser in the case of bending. This study also demonstrates that the sensing performance of respiratory characteristics is increased by nearly a factor of 1.7 under bent

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UV sensing using film bulk acoustic resonators based on Au/n-ZnO/piezoelectric-ZnO/Al structure

Cited by 41 publications

References 26 publications

Realization of Interlinked ZnO Tetrapod Networks for UV Sensor and Room-Temperature Gas Sensor

Realization of Interlinked ZnO Tetrapod Networks for UV Sensor and Room-Temperature Gas Sensor

A new strategy to minimize humidity influences on acoustic wave ultraviolet sensors using ZnO nanowires wrapped with hydrophobic silica nanoparticles

Three-Dimensional Tetrapodal ZnO Microstructured Network Based Flexible Surface Acoustic Wave Device for Ultraviolet and Respiration Monitoring Applications

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