Vacuum behavior and control of a MEMS stage with integrated thermal displacement sensor

Krijnen, B.; Brouwer, Dannis Michel; Abelmann, Léon; Herder, Just L.

doi:10.1016/j.sna.2015.09.005

Cited by 3 publications

(4 citation statements)

References 38 publications

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“…By adding a low-pass or notch filter we can suppress the low-damped resonance frequency peaks if the bandwidth needs to be increased to reach a shorter settling time. This is shown before in [27] and [28]. Figure 6 shows the schematic diagram of the plant (the MEMS stage), the controllers, the GTF and its inverse.…”

Section: Feedback Controlmentioning

confidence: 90%

A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Krijnen¹,

Swinkels²,

Brouwer

et al. 2015

J. Microelectromech. Syst.

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In this paper, we design, fabricate, and validate a large-stroke 3-degree-of-freedom (DOF) positioning stage with integrated displacement sensors for feedback control in a single-mask microelectromechanical systems (MEMS) fabrication process. Three equal shuttles exactly define the position of the stage in x, y, and R z . The kinematic relation between the shuttle positions and the stage position is given by the geometric transfer function. By increasing the order of this geometric transfer function, the stage error can be reduced. Each shuttle consists of a flexure mechanism, a position sensor, and electrostatic comb drive actuators for actuation along a straight line. The range of motion of the stage is limited by electrostatic pull-in of these comb drives. Three parameters of the stage, the leafspring length, the eccentricity, and the tangential arm, have been varied to find their influence on the stage range of motion. These simulation results can be used to design stages with different specifications. Position control of the individual shuttles is applied to control the position of the stage. The stroke of the 3DOF stage is verified up to 161 µm in x, 175 µm in y, and 325 mrad in R z . This exceeds the range of motion of existing stages. [2014-0314]

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Section: Feedback Controlmentioning

confidence: 90%

A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Krijnen¹,

Swinkels²,

Brouwer

et al. 2015

J. Microelectromech. Syst.

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show abstract

“…The specific combination of a ±100 μm displacement and a 50 μN load force is chosen. These specifications have been chosen, since we are working on a multi-DOF platform with a stroke of ±100 μm [29]. This multi-DOF platform also requires an additional load force from our single-DOF actuators.…”

Section: Design and Fabricationmentioning

confidence: 99%

Flexures for large stroke electrostatic actuation in MEMS

Krijnen

Brouwer

2013

J. Micromech. Microeng.

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The stroke of a microelectromechanical systems (MEMS) stage suspended by a flexure mechanism and actuated by electrostatic comb-drives is limited by pull-in. A method to analyze the electrostatic stability of a flexure mechanism and to optimize the stroke with respect to the footprint of flexure mechanisms is presented. Four flexure mechanisms for large stroke are investigated; the standard folded flexure, the slaved folded flexure, the tilted folded flexure and the Watt flexure. Given a certain stroke and load force, the flexures are optimized to have a minimum wafer footprint. From these optimizations it is concluded that the standard folded flexure mechanism is the best flexure mechanism for relatively small strokes (up to ±40 μm) and for larger strokes it is better to use the tilted folded flexure. Several optimized flexure mechanisms have been fabricated and experimentally tested to reach a stroke of ±100 μm. The displacement of the fabricated stages as a function of the actuation voltage could be predicted with 82% accuracy, limited by the fairly large tolerances of our fabrication process.

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“…By adding a low-pass or notch filter we can suppress the low-damped resonance frequency peaks if the bandwidth needs to be increased to reach a shorter settling time. This is shown before in [71,70]. Figure 6.6 shows the schematic diagram of the plant (the MEMS stage), the controllers, the GTF and its inverse.…”

Section: Hzmentioning

confidence: 96%

“…The specific combination of a ±100 ñm displacement and a 50 ñN load force is chosen. These specifications have been chosen, since we are working on a multi-DOF platform with a stroke of ±100 ñm [75]. This multi-DOF platform also requires an additional load force from our single-DOF actuators.…”

Section: Design and Fabricationmentioning

confidence: 99%

A large-stroke planar MEMS-based stage with integrated feedback

Krijnen¹

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Vacuum behavior and control of a MEMS stage with integrated thermal displacement sensor

Cited by 3 publications

References 38 publications

A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Flexures for large stroke electrostatic actuation in MEMS

A large-stroke planar MEMS-based stage with integrated feedback

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