Vacuum Gauge Performance Verification System

Abstract

The paper analyzes a pressure deviation issues in a vacuum technological process, which occurs due to vacuum gauge inaccuracies during its use. For this purpose a unique vacuum system was designed and used for research. Developed system allows verification of vacuum gauges in manufacturing conditions using various experimental settings for obtaining necessary measuring data and allowing to perform an evaluation about its accuracy, repeatability and the need of calibration. In the following research several experiments with ionization vacuum gauges were carried out to obtain performance data. Presented results and vacuum system allowed to develop a new methodology of vacuum gauge verification under manufacturing conditions.

Vacuum Gauge Verification Methodology for Vacuum Coating Deposition Processes

“…Nevertheless, after certain operation time pressure measurements of the vacuum gauges start to vary considerably. Hence a vacuum gauge calibration is commonly used when the pressure measurement accuracy starts to fail and it is impossible to secure necessary nano-coating quality and properties [5]. Some studies analyse vacuum gauge accuracy and calibration period, but there are no clear approaches for vacuum gauge verification under manufacturing conditions before calibration operation.…”