Vacuum metrology and its impact on research and industry

Jousten, Karl

doi:10.1002/vipr.201900715

Cited by 6 publications

(2 citation statements)

References 10 publications

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“…For this reason, response times were defined both in ISO 19685 and 20146. Since Pirani gauges use thermal effects for measurements, they react usually slower than CDGs [8].…”

Section: Vacuum Gauge Calibrationmentioning

confidence: 99%

ISO standards for vacuum metrology

Jousten

2024

Proceedings of the 7th IMEKO TC16 Conference on Pressure and Vacuum Measurement

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During the last decade, several important standards and technical specifications (TS) for vacuum metrology have been published by the International Organisation for Standardisation (ISO) or are under development. The pressure ranges for high and ultrahigh vacuum have been redefined, and extreme high vacuum has been defined internationally for the first time. Basic standards describing vacuum gauge calibration equipment and methods, as well as the uncertainties associated with a calibration, are supplemented by specific standards for characterising or calibrating specific vacuum gauges. Procedures have also been developed for the characterisation of quadrupole mass spectrometers for partial pressure measurement and for the measurement of outgassing rates in a traceable and comparable manner. A TS for the design of a high-precision ionisation vacuum gauge has recently been published. Reliable vacuum measurement is also important for characterising the performance of vacuum pumps.

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“…For this reason, response times were defined both in ISO 19685 and 20146. Since Pirani gauges use thermal effects for measurements, they react usually slower than CDGs [8].…”

Section: Vacuum Gauge Calibrationmentioning

confidence: 99%

ISO standards for vacuum metrology

Jousten

2024

Proceedings of the 7th IMEKO TC16 Conference on Pressure and Vacuum Measurement

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“…The Vacuum Metrology Group of PTB disseminates the pressure scale from 1 × 10 −9 Pa to 1 kPa [8,9]. To realize this range of pressures, several primary standards are maintained and operated.…”

Section: Vacuum Laboratorymentioning

confidence: 99%

Integrating a Calibration Laboratory Workflow Into a Metrological Digital Ecosystem: A Case Study

Eickelberg¹,

Böck²,

Bernien³

et al. 2022

Proceedings of the First International IMEKO TC6 Conference on Metrology and Digital Transformation - M4Dconf2022

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This paper is a case study describing the integration of a digitally transformed calibration workflow into a metrological service ecosystem. The integration on both sides is described in detail at workflow level. Transparency of workflows is a major goal and is supported by introducing status updates. Furthermore, providing a fast and easy information interchange is paramount, and is achieved by focusing on Open Source, standardized and secure communications, like REST interfaces. This case study serves as a blueprint for future-proof IT integration tasks and can be put into a general context with similar projects.

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