2006
DOI: 10.1109/jmems.2006.883568
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Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection

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Cited by 139 publications
(95 citation statements)
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“…without compromising overall performance [26]. The device used throughout this work is already compatible with the volumes and flow rates typically available in microfluidics, and with appropriate integration, similar results should be attainable in the context of detection in gTAS.…”
Section: Resultsmentioning
confidence: 81%
“…without compromising overall performance [26]. The device used throughout this work is already compatible with the volumes and flow rates typically available in microfluidics, and with appropriate integration, similar results should be attainable in the context of detection in gTAS.…”
Section: Resultsmentioning
confidence: 81%
“…23 The Autosampler Chip automates biological measurements by routing samples, reagents, and cleaning solutions to and from a sensor, in this case a Suspended Microchannel Resonator or SMR mass sensor. 24,25 Preliminary experiments show that the FEP Teflon valves in the Autosampler Chip are capable of delivering piranha solution (concentrated sulfuric acid with hydrogen peroxide) to the SMR to strip bound layers from the silica surface of the sensor and reset it to a likenew state. While concentrated sulfuric acid dissolves PDMS, 6 exposure to piranha appears to have no detectable effect on the appearance or operation of the FEP valves in the Autosampler Chip.…”
Section: Discussionmentioning
confidence: 99%
“…Frequently employed in mechanical systems, modal methods are the basis of both dynamic atomic force microscopy (dAFM) and micro-cantilever based sensing. For these systems, accurate measurements of frequency shifts of vibrating microcantilevers are the basis of successful devices [2][3][4]. Continued efforts to improve these and related technologies attest to the general effectiveness of modal methods.…”
Section: Introductionmentioning
confidence: 99%