2013
DOI: 10.2320/matertrans.mf201313
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Vacuum Ultraviolet Irradiation Treatment for Reducing Gold–Gold Bonding Temperature

Abstract: Low-temperature AuAu bonding was achieved under vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O 3 ). The Au surfaces obtained after the VUV/O 3 treatment were analyzed by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) measurements. The results indicate that the amount of carbon-based contaminants was dramatically decreased and that there was no serious damage to Au surfaces caused by the VUV/O 3 treatment. The AuAu bonding temperature was successfully reduced to 15… Show more

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Cited by 20 publications
(6 citation statements)
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“…21,22 To date, VUV has been successfully applied to Au/Au direct bonding as well as the heterogeneous bonding of polyether ether ketone (PEEK) and Pt. 22,23 However, little research has focused on the VUV assisted bonding of Si/Si and quartz/ quartz, and the VUV/O 3 -activated bonding mechanism has never been explored. Therefore, in this paper, we perform a vacuum ultraviolet/ozone (VUV/O 3 ) direct bonding of Si/Si and quartz/quartz, and study the surface morphology and chemical states at different VUV irradiation time in details.…”
Section: Introductionmentioning
confidence: 99%
“…21,22 To date, VUV has been successfully applied to Au/Au direct bonding as well as the heterogeneous bonding of polyether ether ketone (PEEK) and Pt. 22,23 However, little research has focused on the VUV assisted bonding of Si/Si and quartz/ quartz, and the VUV/O 3 -activated bonding mechanism has never been explored. Therefore, in this paper, we perform a vacuum ultraviolet/ozone (VUV/O 3 ) direct bonding of Si/Si and quartz/quartz, and study the surface morphology and chemical states at different VUV irradiation time in details.…”
Section: Introductionmentioning
confidence: 99%
“…[13][14][15][16] For the short 172-nm wavelength VUV, there is essentially 200% photo efficiency for oxygen radicals and ozone cleaning production in air. 12 Therefore, VUV cleaning is much faster than mercury UV lamp cleaning (coexistence of longer wavelengths of 254 nm and 185 nm).…”
Section: Resultsmentioning
confidence: 99%
“…[13][14][15] Recently, a shorter-wavelength vacuum ultraviolet (VUV) irradiation has been found to clean the surface more effectively and thereby applied for the homogenous bonding of Au/Au as well as the heterogeneous bonding between polyether ether ketone (PEEK) and Pt. 16,17 Nevertheless, little attention has been dedicated on direct homo/heterogeneous bonding of silicon and glass using VUV irradiation. In this paper, we propose an environmental-friendly VUV irradiation in air combined with an in situ bonding process.…”
mentioning
confidence: 99%
“…Bonding mechanism discussion.-According to published articles, UV/O 3 irradiation presents two crucial impacts on the bonding surfaces: (1) removing organic contaminants [17][18][19][20][21] and (2) producing hydroxyl on surfaces (see Reactions 3 and 4). 22 The 172-nm wavelength VUV used in the experiment has been reported that can bring about 200% photo efficiency for oxygen radicals and ozone cleaning production in air.…”
Section: Resultsmentioning
confidence: 99%