In
this report, micropatterns of (3-aminopropyl)trimethoxysilane
(APTMS) were developed on hydrophilic and hydrophobic surfaces after
patterning using 172 nm vacuum ultraviolet (VUV) photolithography.
Self-assembled monolayers (SAMs) formed on Si substrates through UV
hydrosilylation of 1-hexadecene (HD) and 10-undecenoic acid (UDA)
were used as hydrophilic and hydrophobic surfaces, respectively. For
templating the HD- and UDA-SAMs, the VUV light was exposed to HD-
and UDA-SAMs from the slits of photomasks in atmospheric and evacuated
environments, respectively. Various oxygenated groups were generated
at the exposed domains of HD-SAM, while the COOH groups were trimmed
from the irradiated domains of UDA-SAM. The APTMS molecules were immobilized
on the domains that were terminated by oxygenated groups after chemical
vapor deposition (CVD). The thicknesses of the developed APTMS micropatterns
increased significantly by raising the CVD temperature and in the
presence of ambient air in the CVD Teflon container as well. The increase
in thicknesses was ascribed to the formation of APTMS multilayers,
which were mediated by H3N+ ions. Also, the
developed APTMS micropatterns on the UDA-SAM patterned by VUV light
irradiation in a high-vacuum environment (HV-VUV) were thicker than
those on the VUV/(O) patterned HD-SAM due to the presence of inactive
oxygenated groups at the surface of VUV/(O)-terminated domains of
HD-SAM such as COO–C and C–O–C groups. The presence
of water or ambient air facilitated the silane coupling between the
silyl groups with the oxygenated and amino groups The combination
of VUV photolithography and the CVD method with control of the conditions
would enable us to control the thicknesses and shapes of the developed
APTMS micropatterns. These findings illustrate the applicability of
VUV photolithography for templating hydrophobic and hydrophobic surfaces
toward the development of organosilane architectures, which can be
feasible for several applications.