Active Li-ion battery materials are typically characterized using X-ray photoelectron spectroscopy when regarding chemical state elucidation. This work presents a multiplet-splitting approach comprising in minimum 3 third-row transition metals, namely, Mn, Co, and Ni, to improve the results in comparison to peak barycenter or single symmetric Voigt profile approaches. The achieved X-ray photoelectron spectroscopy 2p templates in particular address the complex peak structures consisting of significant photoelectron multiplet splitting, shake-up and plasmon loss features, and additional Auger and photoelectron overlaps, inevitable also for a reliable quantification. To separate from topography effects and contributions of the electrode's binder and conductive carbon in powder electrodes, the developed procedure in a first attempt was successfully transferred to novel radio frequency magnetron sputtered Li-Ni-Co-Mn-O thin films, designed for all-solid-state Li-ion batteries. In all cases, special care was taken with respect to air sensitivity, contamination during sample handling, and probable method induced sample decomposition. Composition and origin of the anode's surface electrolyte interphase are rather complicated, and therefore, XPS and time-of-flight secondary ion mass spectrometry results are still controversially discussed. [5][6][7][8][9][10][11] However, in the case of the first-row transition metals, which are commonly used in LIB's cathodes, the analytical potential of XPS is not widely used in its entirety. Obviously, the major reason for this fact is mainly due to the complex multiplet splitting, peak overlaps, and additional shake-up and plasmon features in the respective 2p XP spectra, although fundamental studies are available mainly by the work of Biesinger et al, 12 who considered a semiempirical approach combining the analysis of high purity oxide/hydroxide reference samples and theoretically calculated free-ion multiplet structures of core 2p vacancy levels by Gupta and Sen. 13 Aside presenting only raw data sets and solely assigning expected oxidation states, [14][15][16][17][18][19][20] simplifying approaches such as reducing the complex multiplet splitting to single Voigt peak shapes are often used, which, in consequence, could lead at least to uncertainties in the quantitative chemical information. 17,[21][22][23][24] To the best of our knowledge, only a few groups apply complex multiplet fitting procedures during XPS characterization of LIB active materials. 25,26