2005
DOI: 10.1016/j.precisioneng.2004.09.003
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Validation of a single fibre-fed heterodyne laser interferometer with nanometre uncertainty

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Cited by 9 publications
(11 citation statements)
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“…These results are in agreement with Eqs. (10) and (12) and confirm that the disturbance from the eom is cancelled by the differential action between PD 3;4 . However, a close up of Fig.…”
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confidence: 55%
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“…These results are in agreement with Eqs. (10) and (12) and confirm that the disturbance from the eom is cancelled by the differential action between PD 3;4 . However, a close up of Fig.…”
mentioning
confidence: 55%
“…Still, it is difficult for coaxial based interferometer systems to deliver the source frequencies directly to individual interferometers within a host system. Research [10] indicates that fiber delivery of a coaxial beam with one polarization maintaining single-mode fiber is possible, but increases PNL due to frequency mixing within the optical fiber. This necessitates separated source frequency transport using two optical fibers, and coaxially recombining them into a free-space beam inside the host system [see Fig.…”
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confidence: 99%
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“…However, periodic nonlinearity in the measurement is more difficult to eliminate because it arises from a combination of source mixing, manufacturing tolerances, and imperfect alignment. Fiber delivery will inherently decrease polarization stability and add timevarying effects, which further complicates the signal processing for interferometers susceptible to periodic nonlinearity [17].Several heterodyne interferometer configurations have been developed that limit the chances for periodic nonlinearity [18][19][20][21][22][23]. These interferometers generally use a spatially separated source and limit all reference and measurement beam overlaps until the final interfering surface prior to detection.…”
mentioning
confidence: 99%
“…However, periodic nonlinearity in the measurement is more difficult to eliminate because it arises from a combination of source mixing, manufacturing tolerances, and imperfect alignment. Fiber delivery will inherently decrease polarization stability and add timevarying effects, which further complicates the signal processing for interferometers susceptible to periodic nonlinearity [17].…”
mentioning
confidence: 99%